Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform

J. F. Liu, D. Ahn, C. Y. Hong, D. Pan, S. Jongthammanurak, M. Beals, L. C. Kimerling, J. Michel, A. T. Pomerene, D. Carothers, C. Hill, M. Jaso, K. Y. Tu, Y. K. Chen, S. Patel, Mahmoud Rasras, D. M. Gill, A. E. White

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present selectively grown Ge p-i-n photodetectors coupled to high index contrast Si(core)/SiO2(cladding) waveguides on a silicon-on-insulator (SOI) platform. Two coupling schemes, namely butt-coupling and vertical coupling, were demonstrated in this study. With the butt-coupling scheme we have achieved a high responsivity of 1.0 A/W at 1520 nm and a 3dB bandwidth greater than 4.5 GHz at 1550 nm. With the vertical coupling scheme, where the light couples from a Si waveguide evanescently to the Ge detector on top of it, a responsivity of 0.22A/W and a 3dB bandwidth of ∼1.5 GHz have been demonstrated at 1550 nm. The devices were fabricated on a standard 180 nm industrial complementary metal oxide semiconductor production (CMOS) line, and can be integrated with CMOS circuitry for electronic and photonic integrated circuits.

Original languageEnglish (US)
Title of host publication2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO
Pages1-4
Number of pages4
DOIs
StatePublished - Dec 1 2006
Event2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO - Wuhan, China
Duration: Nov 1 2006Nov 4 2006

Other

Other2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO
CountryChina
CityWuhan
Period11/1/0611/4/06

Fingerprint

Silicon
Photodetectors
Waveguides
Metals
Bandwidth
Photonics
Integrated circuits
Detectors
Oxide semiconductors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Liu, J. F., Ahn, D., Hong, C. Y., Pan, D., Jongthammanurak, S., Beals, M., ... White, A. E. (2006). Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform. In 2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO (pp. 1-4). [4085559] https://doi.org/10.1109/OVCISO.2006.302697

Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform. / Liu, J. F.; Ahn, D.; Hong, C. Y.; Pan, D.; Jongthammanurak, S.; Beals, M.; Kimerling, L. C.; Michel, J.; Pomerene, A. T.; Carothers, D.; Hill, C.; Jaso, M.; Tu, K. Y.; Chen, Y. K.; Patel, S.; Rasras, Mahmoud; Gill, D. M.; White, A. E.

2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO. 2006. p. 1-4 4085559.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Liu, JF, Ahn, D, Hong, CY, Pan, D, Jongthammanurak, S, Beals, M, Kimerling, LC, Michel, J, Pomerene, AT, Carothers, D, Hill, C, Jaso, M, Tu, KY, Chen, YK, Patel, S, Rasras, M, Gill, DM & White, AE 2006, Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform. in 2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO., 4085559, pp. 1-4, 2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO, Wuhan, China, 11/1/06. https://doi.org/10.1109/OVCISO.2006.302697
Liu JF, Ahn D, Hong CY, Pan D, Jongthammanurak S, Beals M et al. Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform. In 2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO. 2006. p. 1-4. 4085559 https://doi.org/10.1109/OVCISO.2006.302697
Liu, J. F. ; Ahn, D. ; Hong, C. Y. ; Pan, D. ; Jongthammanurak, S. ; Beals, M. ; Kimerling, L. C. ; Michel, J. ; Pomerene, A. T. ; Carothers, D. ; Hill, C. ; Jaso, M. ; Tu, K. Y. ; Chen, Y. K. ; Patel, S. ; Rasras, Mahmoud ; Gill, D. M. ; White, A. E. / Waveguide integrated Ge p-i-n photodetectors on a silicon-on-insulator platform. 2006 Optics Valley of China International Symposium on Optoelectronics, OVC EXPO. 2006. pp. 1-4
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AU - Jongthammanurak, S.

AU - Beals, M.

AU - Kimerling, L. C.

AU - Michel, J.

AU - Pomerene, A. T.

AU - Carothers, D.

AU - Hill, C.

AU - Jaso, M.

AU - Tu, K. Y.

AU - Chen, Y. K.

AU - Patel, S.

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