Vacuum ultraviolet emissions from a cylindrical dielectric barrier discharge in neon and neon-hydrogen mixtures

N. Masoud, K. Martus, K. Becker

Research output: Contribution to journalArticle

Abstract

The vacuum ultraviolet (VUV) emissions from a cylindrical dielectric barrier discharge (C-DBD) excited by radio frequency (rf) power at 13.56 MHz in both pure Ne and in a mixture of Ne and H2 were analyzed. Measurements of the relative emission intensity of the Ne resonance lines and the Ne2 * excimer continua in pure neon were studied as a function of pressure, rf power, and gas flow rate. In Ne-H2 mixtures, we studied the emission of the H Lyman-α line as a function of H2 concentration, pressure, gas flow rate, and rf power. The observed dependence of the VUV emissions on the gas pressure, net rf power, gas flow rate and, in the case of the spectra of the Ne-H2 plasma, the H 2 concentration is explained on the basis of a detailed microscopic analysis of the excimer formation and destruction processes and the competition between the vibrational relaxation processes, quenching processes, and the radiative decay of two excimer states involved.

Original languageEnglish (US)
Pages (from-to)395-403
Number of pages9
JournalInternational Journal of Mass Spectrometry
Volume233
Issue number1-3
DOIs
StatePublished - Apr 15 2004

Fingerprint

Neon
ultraviolet emission
neon
Hydrogen
radio frequencies
excimers
Vacuum
gas flow
Flow of gases
vacuum
flow velocity
Flow rate
hydrogen
Relaxation processes
molecular relaxation
resonance lines
destruction
gas pressure
Quenching
Gases

Keywords

  • Discharge plasma
  • Excimer emission
  • Hydrogen
  • Lyman-α line
  • Neon

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy

Cite this

Vacuum ultraviolet emissions from a cylindrical dielectric barrier discharge in neon and neon-hydrogen mixtures. / Masoud, N.; Martus, K.; Becker, K.

In: International Journal of Mass Spectrometry, Vol. 233, No. 1-3, 15.04.2004, p. 395-403.

Research output: Contribution to journalArticle

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N2 - The vacuum ultraviolet (VUV) emissions from a cylindrical dielectric barrier discharge (C-DBD) excited by radio frequency (rf) power at 13.56 MHz in both pure Ne and in a mixture of Ne and H2 were analyzed. Measurements of the relative emission intensity of the Ne resonance lines and the Ne2 * excimer continua in pure neon were studied as a function of pressure, rf power, and gas flow rate. In Ne-H2 mixtures, we studied the emission of the H Lyman-α line as a function of H2 concentration, pressure, gas flow rate, and rf power. The observed dependence of the VUV emissions on the gas pressure, net rf power, gas flow rate and, in the case of the spectra of the Ne-H2 plasma, the H 2 concentration is explained on the basis of a detailed microscopic analysis of the excimer formation and destruction processes and the competition between the vibrational relaxation processes, quenching processes, and the radiative decay of two excimer states involved.

AB - The vacuum ultraviolet (VUV) emissions from a cylindrical dielectric barrier discharge (C-DBD) excited by radio frequency (rf) power at 13.56 MHz in both pure Ne and in a mixture of Ne and H2 were analyzed. Measurements of the relative emission intensity of the Ne resonance lines and the Ne2 * excimer continua in pure neon were studied as a function of pressure, rf power, and gas flow rate. In Ne-H2 mixtures, we studied the emission of the H Lyman-α line as a function of H2 concentration, pressure, gas flow rate, and rf power. The observed dependence of the VUV emissions on the gas pressure, net rf power, gas flow rate and, in the case of the spectra of the Ne-H2 plasma, the H 2 concentration is explained on the basis of a detailed microscopic analysis of the excimer formation and destruction processes and the competition between the vibrational relaxation processes, quenching processes, and the radiative decay of two excimer states involved.

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KW - Lyman-α line

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