Two-dimensional ion flux distributions in inductively coupled plasmas: Effect of adding electronegative gases to Ar

Tae Won Kim, Eray S. Aydil

Research output: Contribution to journalArticle

Abstract

The ion current density and corresponding uniformity in Ar/SF6 and Ar/Cl2 discharges were measured using a two-dimensional array of planar Langmuir probes which were built on a 200 mm diameter silicon wafer. Experiments were conducted in a high-density inductively coupled plasma reactor which was equipped with multiple plasma and surface diagnostics. Results indicated that the ion current density in a pure argon discharge increased with increased pressure and the discharges became more uniform as ion diffusion rate slowed down at high pressures.

Original languageEnglish (US)
Pages (from-to)6444-6450
Number of pages7
JournalJournal of Applied Physics
Volume92
Issue number11
DOIs
StatePublished - Dec 1 2002

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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