Trajectory morphing applied to epitaxial thin film growth

A. P. Engelmann, David G. Meyer, John Hauser, Russell Caflisch

Research output: Contribution to journalConference article

Abstract

The trajectory morphing which can be successfully applied to explore the trajectory space for an epitaxial thin film growth model is presented. A multi-layer epitaxial thin film growth model was demonstrated along with a simplified version used to generate a desired trajectory for the full model.

Original languageEnglish (US)
Pages (from-to)3589-3593
Number of pages5
JournalProceedings of the American Control Conference
Volume5
StatePublished - Dec 1 1999
EventProceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA
Duration: Jun 2 1999Jun 4 1999

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Engelmann, A. P., Meyer, D. G., Hauser, J., & Caflisch, R. (1999). Trajectory morphing applied to epitaxial thin film growth. Proceedings of the American Control Conference, 5, 3589-3593.