Surface micromachining of polydimethylsiloxane (PDMS) for microfluidic biomedical applications

Weiqiang Chen, Nien Tsu Huang, Katsuo Kurabayashi, Jianping Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O2 plasma treatment to PDMS to activate its surface to overcome the challenge of poor photoresist adhesion on PDMS for photolithography. Our photolithographic PDMS surface micromachining technique is compatible with conventional soft lithography and other silicon-based surface and bulk micromachining techniques. To illustrate the general application of our method, we demonstrated fabrications of large microfiltration membranes and free-standing beam structures in PDMS for different biological applications.

Original languageEnglish (US)
Title of host publicationProceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
PublisherChemical and Biological Microsystems Society
Pages1849-1851
Number of pages3
ISBN (Print)9780979806452
StatePublished - 2012
Event16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 - Okinawa, Japan
Duration: Oct 28 2012Nov 1 2012

Other

Other16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
CountryJapan
CityOkinawa
Period10/28/1211/1/12

Fingerprint

Surface micromachining
Polydimethylsiloxane
Microfluidics
Photolithography
Microfiltration
Reactive ion etching
Micromachining
Silicon
Photoresists
baysilon
Lithography
Adhesion
Membranes
Plasmas
Fabrication

Keywords

  • Microfabrication
  • Microfluidics
  • PDMS

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

Cite this

Chen, W., Huang, N. T., Kurabayashi, K., & Fu, J. (2012). Surface micromachining of polydimethylsiloxane (PDMS) for microfluidic biomedical applications. In Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 (pp. 1849-1851). Chemical and Biological Microsystems Society.

Surface micromachining of polydimethylsiloxane (PDMS) for microfluidic biomedical applications. / Chen, Weiqiang; Huang, Nien Tsu; Kurabayashi, Katsuo; Fu, Jianping.

Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society, 2012. p. 1849-1851.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, W, Huang, NT, Kurabayashi, K & Fu, J 2012, Surface micromachining of polydimethylsiloxane (PDMS) for microfluidic biomedical applications. in Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society, pp. 1849-1851, 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012, Okinawa, Japan, 10/28/12.
Chen W, Huang NT, Kurabayashi K, Fu J. Surface micromachining of polydimethylsiloxane (PDMS) for microfluidic biomedical applications. In Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society. 2012. p. 1849-1851
Chen, Weiqiang ; Huang, Nien Tsu ; Kurabayashi, Katsuo ; Fu, Jianping. / Surface micromachining of polydimethylsiloxane (PDMS) for microfluidic biomedical applications. Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society, 2012. pp. 1849-1851
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