Stress-assisted copper-induced lateral growth of polycrystalline germanium

B. Hekmatshoar, Davood Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz, M. Robertson, A. Afzali-Kusha

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Lateral growth of poly-Ge at temperatures as low as 150°C is reported. External mechanical stress has been properly manipulated to drive the low temperature Cu-induced crystallization of poly-Ge wherever Cu is deposited to form the crystallization seed for lateral growth. Uniaxial compressive stress has been externally applied to the Ge layer by bending the flexible PET substrate inward. A 10-hour period thermo-mechanical post-treatment in the presence of 0.05% equivalent compressive strain leads to a growth rate of 2.5 μm/hour in the direction of the applied stress and 1.8 μm/hour in the perpendicular direction, as confirmed by SEM analysis. We believe that partial growth of the Cu-seeded poly-Ge region in the form of tetragonal structures is the key feature which leads to the lateral growth of the pure-Ge strip. Elimination of the compressive stress hinders the lateral growth completely, even at reasonably high temperatures.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsS.G. Corcoran, Y.-C. Joo, N.R. Moody, Z. Suo
Pages199-204
Number of pages6
Volume795
StatePublished - 2003
EventThin Films - Stresses and Mechanical Properties X - Boston, MA., United States
Duration: Dec 1 2003Dec 5 2003

Other

OtherThin Films - Stresses and Mechanical Properties X
CountryUnited States
CityBoston, MA.
Period12/1/0312/5/03

Fingerprint

Germanium
Copper
Crystallization
Compressive stress
Temperature
Seed
Scanning electron microscopy
Substrates

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Hekmatshoar, B., Shahrjerdi, D., Mohajerzadeh, S., Khakifirooz, A., Robertson, M., & Afzali-Kusha, A. (2003). Stress-assisted copper-induced lateral growth of polycrystalline germanium. In S. G. Corcoran, Y-C. Joo, N. R. Moody, & Z. Suo (Eds.), Materials Research Society Symposium - Proceedings (Vol. 795, pp. 199-204)

Stress-assisted copper-induced lateral growth of polycrystalline germanium. / Hekmatshoar, B.; Shahrjerdi, Davood; Mohajerzadeh, S.; Khakifirooz, A.; Robertson, M.; Afzali-Kusha, A.

Materials Research Society Symposium - Proceedings. ed. / S.G. Corcoran; Y.-C. Joo; N.R. Moody; Z. Suo. Vol. 795 2003. p. 199-204.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hekmatshoar, B, Shahrjerdi, D, Mohajerzadeh, S, Khakifirooz, A, Robertson, M & Afzali-Kusha, A 2003, Stress-assisted copper-induced lateral growth of polycrystalline germanium. in SG Corcoran, Y-C Joo, NR Moody & Z Suo (eds), Materials Research Society Symposium - Proceedings. vol. 795, pp. 199-204, Thin Films - Stresses and Mechanical Properties X, Boston, MA., United States, 12/1/03.
Hekmatshoar B, Shahrjerdi D, Mohajerzadeh S, Khakifirooz A, Robertson M, Afzali-Kusha A. Stress-assisted copper-induced lateral growth of polycrystalline germanium. In Corcoran SG, Joo Y-C, Moody NR, Suo Z, editors, Materials Research Society Symposium - Proceedings. Vol. 795. 2003. p. 199-204
Hekmatshoar, B. ; Shahrjerdi, Davood ; Mohajerzadeh, S. ; Khakifirooz, A. ; Robertson, M. ; Afzali-Kusha, A. / Stress-assisted copper-induced lateral growth of polycrystalline germanium. Materials Research Society Symposium - Proceedings. editor / S.G. Corcoran ; Y.-C. Joo ; N.R. Moody ; Z. Suo. Vol. 795 2003. pp. 199-204
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