Simulation study of a capacitively coupled plasma torch array

E. Koretzky, Spencer Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An array of air plasma torches can be lit up simultaneously by a single common AC source using capacitors as ballasting circuit elements to prevent voltage shortage in the other electrode pairs due to the discharge in one pair. The set-up is modeled as coupled resistance-inductance-capacitance circuits, each electrode pair in the presence of the plasma torch is represented by a parallel resistance-capacitance circuit. The dynamics of the plasma is described by the rate equations of the electrons, positive ions and negative ions. The results for the voltage and current functions of the ballasting capacitors, the source, and the electrode pairs are obtained, and compare favorably with experimental measurements.

Original languageEnglish (US)
Title of host publicationIEEE International Conference on Plasma Science
Editors Anon
PublisherIEEE
Pages274
Number of pages1
StatePublished - 1998
EventProceedings of the 1998 IEEE International Conference on Plasma Science - Raleigh, NC, USA
Duration: Jun 1 1998Jun 4 1998

Other

OtherProceedings of the 1998 IEEE International Conference on Plasma Science
CityRaleigh, NC, USA
Period6/1/986/4/98

Fingerprint

plasma torches
electrodes
capacitors
capacitance
simulation
electric potential
positive ions
inductance
negative ions
alternating current
air
ions
electrons

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Koretzky, E., & Kuo, S. (1998). Simulation study of a capacitively coupled plasma torch array. In Anon (Ed.), IEEE International Conference on Plasma Science (pp. 274). IEEE.

Simulation study of a capacitively coupled plasma torch array. / Koretzky, E.; Kuo, Spencer.

IEEE International Conference on Plasma Science. ed. / Anon. IEEE, 1998. p. 274.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Koretzky, E & Kuo, S 1998, Simulation study of a capacitively coupled plasma torch array. in Anon (ed.), IEEE International Conference on Plasma Science. IEEE, pp. 274, Proceedings of the 1998 IEEE International Conference on Plasma Science, Raleigh, NC, USA, 6/1/98.
Koretzky E, Kuo S. Simulation study of a capacitively coupled plasma torch array. In Anon, editor, IEEE International Conference on Plasma Science. IEEE. 1998. p. 274
Koretzky, E. ; Kuo, Spencer. / Simulation study of a capacitively coupled plasma torch array. IEEE International Conference on Plasma Science. editor / Anon. IEEE, 1998. pp. 274
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