Self-aligned enhancement-mode GaAs MOSFETs with AI203 gate dielectric

Davood Shahrjerdi, Emanuel Tutuc, Sanjay K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationTECHCON, 2008
StatePublished - 2008

Cite this

Shahrjerdi, D., Tutuc, E., & Banerjee, S. K. (2008). Self-aligned enhancement-mode GaAs MOSFETs with AI203 gate dielectric. In TECHCON, 2008