Scanning tunneling microscopic and field emission microscopic studies of nanostructured molybdenum film synthesized by electron cyclotron resonance plasma

Vishwas S. Purohit, A. B. Bhise, Shirshendu Dey, M. A. More, C. V. Dharmadhikari, D. S. Joag, Renu Pasricha, S. V. Bhoraskar

Research output: Contribution to journalArticle

Abstract

Cathodic sputtering is demonstrated to be effective in synthesizing thin films of molybdenum nanoparticles. An electron cyclotron resonance plasma reactor has been used as the source. The particle size distribution is found to be controllable by proper choice of the cathodic bias potential. Sizes ranging between 20 and 30 nm deposited at the optimum bias potential are found to exhibit a self assembled structure as observed by scanning tunneling microscopy. Field emission microscopic studies on these films supported on W have exhibited very stable emission current over a period of 3 h.

Original languageEnglish (US)
Pages (from-to)435-443
Number of pages9
JournalVacuum
Volume83
Issue number2
DOIs
StatePublished - Sep 26 2008

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Keywords

  • ECR plasma
  • Field emission microscopy
  • Hollow cathode chemical sputtering
  • Mo nanoparticles
  • Scanning tunneling microscopy

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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