Robust proportional-integral-derivative controller design for an electrostatic micro-actuator with measurement uncertainties

M. Vagia, Y. Koveos, G. Nikolakopoulos, Antonios Tzes

Research output: Contribution to journalArticle

Abstract

In this study the effects of unaccounted modal dynamics within the control scheme of an electrostatic micro-actuator (μ-A) are presented. The μ-A is composed of a-capacitor, whose one plate is clamped on the ground whereas its other plate is floating on the air. The dynamic model of the μ-A allows both lateral and angular movements of the upper plate. The feedback controller is designed based on the single-mode (lateral) linearised model. The reduced non-linear model (RnM) is linearised at multiple operating points, and the designed proportional-integral-derivative (PID)-controller, tuned via linear matrix inequalities (LMIs)-theory, stabilises all linear modes within the polytopic defined by the vertices of the linearised systems. The overall scheme comprises: (a) a feedforward controller that stabilises the μ-A around its nominal operating points and (b) a robust PID controller that handles deviations from the operating points. The resulting overall control scheme is applied to the non-linear (bimodal structure) of a μ-A, and the simulation results derived are used to investigate the efficacy of the suggested control architecture.

Original languageEnglish (US)
Pages (from-to)2793-2801
Number of pages9
JournalIET Control Theory and Applications
Volume4
Issue number12
DOIs
StatePublished - Dec 1 2010

Fingerprint

Microactuator
Measurement Uncertainty
Controller Design
Electrostatics
Actuators
Directly proportional
Derivatives
Controller
Derivative
Controllers
Lateral
Reduced Model
Bimodal
Single Mode
Capacitor
Feedforward
Linear matrix inequalities
Categorical or nominal
Nonlinear Model
Matrix Inequality

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Human-Computer Interaction
  • Computer Science Applications
  • Control and Optimization
  • Electrical and Electronic Engineering

Cite this

Robust proportional-integral-derivative controller design for an electrostatic micro-actuator with measurement uncertainties. / Vagia, M.; Koveos, Y.; Nikolakopoulos, G.; Tzes, Antonios.

In: IET Control Theory and Applications, Vol. 4, No. 12, 01.12.2010, p. 2793-2801.

Research output: Contribution to journalArticle

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