Robust H controller-design for an electrostatic micro-actuator with squeezed gas film damping effects

Marialena Vagia, Antonios Tzes

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    In this article the modeling and control design aspects of an electrostatic microactuator (EmA) with squeezed thin film damping effects are presented. The modeling analysis of the squeezed film damping effect is investigated in the case of an EmA composed by a set of two plates. The bottom plate is clamped to the ground, while the moving plate is driven by an electrically induced force which is opposed by the force exerted by a spring element. The nonlinear model of the EmA is linearized in multiple operating points with respect to the plates' displacement. A robust H-controller relying on LMI-theory is designed for the set of the resulting multiple operating models. The resulting controller stabilizes the set of linearized systems at the operating points. Particular attention is paid in order to examine the stability issue within the intervals of the operating points. Simulation results investigate the efficacy of the suggested modeling and control techniques.

    Original languageEnglish (US)
    Title of host publication2009 European Control Conference, ECC 2009
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages2881-2886
    Number of pages6
    ISBN (Electronic)9783952417393
    StatePublished - Mar 26 2014
    Event2009 10th European Control Conference, ECC 2009 - Budapest, Hungary
    Duration: Aug 23 2009Aug 26 2009

    Other

    Other2009 10th European Control Conference, ECC 2009
    CountryHungary
    CityBudapest
    Period8/23/098/26/09

    Fingerprint

    Microactuators
    Electrostatics
    Actuators
    Damping
    Controllers
    Gases
    Thin films

    ASJC Scopus subject areas

    • Control and Systems Engineering

    Cite this

    Vagia, M., & Tzes, A. (2014). Robust H controller-design for an electrostatic micro-actuator with squeezed gas film damping effects. In 2009 European Control Conference, ECC 2009 (pp. 2881-2886). [7074845] Institute of Electrical and Electronics Engineers Inc..

    Robust H controller-design for an electrostatic micro-actuator with squeezed gas film damping effects. / Vagia, Marialena; Tzes, Antonios.

    2009 European Control Conference, ECC 2009. Institute of Electrical and Electronics Engineers Inc., 2014. p. 2881-2886 7074845.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Vagia, M & Tzes, A 2014, Robust H controller-design for an electrostatic micro-actuator with squeezed gas film damping effects. in 2009 European Control Conference, ECC 2009., 7074845, Institute of Electrical and Electronics Engineers Inc., pp. 2881-2886, 2009 10th European Control Conference, ECC 2009, Budapest, Hungary, 8/23/09.
    Vagia M, Tzes A. Robust H controller-design for an electrostatic micro-actuator with squeezed gas film damping effects. In 2009 European Control Conference, ECC 2009. Institute of Electrical and Electronics Engineers Inc. 2014. p. 2881-2886. 7074845
    Vagia, Marialena ; Tzes, Antonios. / Robust H controller-design for an electrostatic micro-actuator with squeezed gas film damping effects. 2009 European Control Conference, ECC 2009. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 2881-2886
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