Review of modeling electrostatically actuated microelectromechanical systems

R. C. Batra, Maurizio Porfiri, D. Spinello

Research output: Contribution to journalArticle

Abstract

A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the coupled electromechanical fluid-structure interaction problem are outlined. Simplified reduced-order models are illustrated along with assumptions that define their range of applicability. Theoretical, numerical and experimental works are classified according to the mechanical model used in the analysis.

Original languageEnglish (US)
JournalSmart Materials and Structures
Volume16
Issue number6
DOIs
StatePublished - Dec 1 2007

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microelectromechanical systems
MEMS
Microelectromechanical devices
solid mechanics
Electromagnetism
Electrostatic force
fluid mechanics
Fluid structure interaction
Fluid mechanics
electrostatics
electromagnetism
formulations
thermodynamics
fluids
interactions

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Review of modeling electrostatically actuated microelectromechanical systems. / Batra, R. C.; Porfiri, Maurizio; Spinello, D.

In: Smart Materials and Structures, Vol. 16, No. 6, 01.12.2007.

Research output: Contribution to journalArticle

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