Real-time, in situ monitoring of semiconductor processing

Richard A. Gottscho, Eray Aydil, Konstantinos P. Giapis, Jeffrey A. Gregus, Euijoon Yoon, Todd R. Hayes, Matthew F. Vernon, U. K. Chakrabarti

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationLEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages7-8
Number of pages2
ISBN (Electronic)0780305264
DOIs
StatePublished - Jan 1 1992
Event1992 Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1992 - Boston, United States
Duration: Nov 16 1992Nov 19 1992

Publication series

NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1992-November
ISSN (Print)1092-8081

Conference

Conference1992 Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1992
CountryUnited States
CityBoston
Period11/16/9211/19/92

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Gottscho, R. A., Aydil, E., Giapis, K. P., Gregus, J. A., Yoon, E., Hayes, T. R., Vernon, M. F., & Chakrabarti, U. K. (1992). Real-time, in situ monitoring of semiconductor processing. In LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting (pp. 7-8). [693817] (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 1992-November). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/LEOS.1992.693817