Pull-in instability in elecrostatically actuated MEMS

R. C. Batra, Maurizio Porfiri, D. Spinello

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

Original languageEnglish (US)
Title of host publicationAdvances in multiphysics simulation of MEMS and NEMS
EditorsN. Aluru, C. Cercignani, A. Frangi, S. Mukherjee
PublisherImperial College Press
Pages329-374
StatePublished - 2008

Cite this

Batra, R. C., Porfiri, M., & Spinello, D. (2008). Pull-in instability in elecrostatically actuated MEMS. In N. Aluru, C. Cercignani, A. Frangi, & S. Mukherjee (Eds.), Advances in multiphysics simulation of MEMS and NEMS (pp. 329-374). [Chapter 9] Imperial College Press.