Properties of the rf discharge in Ar-TEOS mixtures

R. Foest, R. Basner, M. Schmidt, F. Hempel, Kurt Becker

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

Original languageEnglish (US)
Title of host publicationGaseous dielectrics VIII
EditorsL.G. Christophorou
Place of PublicationNew York
PublisherPlenum Press
Pages161-166
StatePublished - 1998

Cite this

Foest, R., Basner, R., Schmidt, M., Hempel, F., & Becker, K. (1998). Properties of the rf discharge in Ar-TEOS mixtures. In L. G. Christophorou (Ed.), Gaseous dielectrics VIII (pp. 161-166). New York: Plenum Press.

Properties of the rf discharge in Ar-TEOS mixtures. / Foest, R.; Basner, R.; Schmidt, M.; Hempel, F.; Becker, Kurt.

Gaseous dielectrics VIII. ed. / L.G. Christophorou. New York : Plenum Press, 1998. p. 161-166.

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

Foest, R, Basner, R, Schmidt, M, Hempel, F & Becker, K 1998, Properties of the rf discharge in Ar-TEOS mixtures. in LG Christophorou (ed.), Gaseous dielectrics VIII. Plenum Press, New York, pp. 161-166.
Foest R, Basner R, Schmidt M, Hempel F, Becker K. Properties of the rf discharge in Ar-TEOS mixtures. In Christophorou LG, editor, Gaseous dielectrics VIII. New York: Plenum Press. 1998. p. 161-166
Foest, R. ; Basner, R. ; Schmidt, M. ; Hempel, F. ; Becker, Kurt. / Properties of the rf discharge in Ar-TEOS mixtures. Gaseous dielectrics VIII. editor / L.G. Christophorou. New York : Plenum Press, 1998. pp. 161-166
@inbook{d0f94018cb5a4d4faaf308e71427b736,
title = "Properties of the rf discharge in Ar-TEOS mixtures",
author = "R. Foest and R. Basner and M. Schmidt and F. Hempel and Kurt Becker",
year = "1998",
language = "English (US)",
pages = "161--166",
editor = "L.G. Christophorou",
booktitle = "Gaseous dielectrics VIII",
publisher = "Plenum Press",

}

TY - CHAP

T1 - Properties of the rf discharge in Ar-TEOS mixtures

AU - Foest, R.

AU - Basner, R.

AU - Schmidt, M.

AU - Hempel, F.

AU - Becker, Kurt

PY - 1998

Y1 - 1998

M3 - Chapter (peer-reviewed)

SP - 161

EP - 166

BT - Gaseous dielectrics VIII

A2 - Christophorou, L.G.

PB - Plenum Press

CY - New York

ER -