Parallelization of thermochemical nanolithography

Keith M. Carroll, Xi Lu, Suenne Kim, Yang Gao, Hoe Joon Kim, Suhas Somnath, Laura Polloni, Roman Sordan, William P. King, Jennifer E. Curtis, Elisa Riedo

Research output: Contribution to journalArticle

Abstract

One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

Original languageEnglish (US)
Pages (from-to)1299-1304
Number of pages6
JournalNanoscale
Volume6
Issue number3
DOIs
StatePublished - Feb 7 2014

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Nanolithography
Nanostructures
Fabrication
Nanoribbons
Carbon Nanotubes
Graphite
Conjugated polymers
Graphene

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Carroll, K. M., Lu, X., Kim, S., Gao, Y., Kim, H. J., Somnath, S., ... Riedo, E. (2014). Parallelization of thermochemical nanolithography. Nanoscale, 6(3), 1299-1304. https://doi.org/10.1039/c3nr05696a

Parallelization of thermochemical nanolithography. / Carroll, Keith M.; Lu, Xi; Kim, Suenne; Gao, Yang; Kim, Hoe Joon; Somnath, Suhas; Polloni, Laura; Sordan, Roman; King, William P.; Curtis, Jennifer E.; Riedo, Elisa.

In: Nanoscale, Vol. 6, No. 3, 07.02.2014, p. 1299-1304.

Research output: Contribution to journalArticle

Carroll, KM, Lu, X, Kim, S, Gao, Y, Kim, HJ, Somnath, S, Polloni, L, Sordan, R, King, WP, Curtis, JE & Riedo, E 2014, 'Parallelization of thermochemical nanolithography', Nanoscale, vol. 6, no. 3, pp. 1299-1304. https://doi.org/10.1039/c3nr05696a
Carroll KM, Lu X, Kim S, Gao Y, Kim HJ, Somnath S et al. Parallelization of thermochemical nanolithography. Nanoscale. 2014 Feb 7;6(3):1299-1304. https://doi.org/10.1039/c3nr05696a
Carroll, Keith M. ; Lu, Xi ; Kim, Suenne ; Gao, Yang ; Kim, Hoe Joon ; Somnath, Suhas ; Polloni, Laura ; Sordan, Roman ; King, William P. ; Curtis, Jennifer E. ; Riedo, Elisa. / Parallelization of thermochemical nanolithography. In: Nanoscale. 2014 ; Vol. 6, No. 3. pp. 1299-1304.
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