Optical emissions in the wavelength region 2000-6000 AA produced by electron impact dissociation of NF3, CF4 and SF 6

K. A. Blanks, K. Becker

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Abstract

Light emissions in the wavelength region 2000-6000 AA produced by dissociative electron impact on CF4, NF3 and SF 6 were studied. A double-onset structure in the cross section of the intense continuous emission from CF4 was found and might be interpreted as evidence that excited CF3 + 3 fragment ions produced by two different mechanisms rather than CF 4 + parent ions are the emitting species. Comparatively weak fluorine 4p to 3 s line emissions resulting from the total fragmentation of the parent NF3 and SF6 molecules were also observed. In both cases the 2.4D to 4P multiplet at 3669 AA has the largest emission cross section with 4.4+or-1.2*10-20 cm 2 and 12.9+or-3.3*10-20 cm2 from SF 6 and NF3, respectively, at 100 eV. Four F II emissions with comparatively high onset potentials and maximum emission cross sections in the 10-20 cm2 range (at 200 eV) were found in the NF 3 spectrum but not in the SF6 spectrum. The break-up of both SF6 and NF3 leads to a broad unstructured emission between 2000 and 3200 AA which has not yet been identified.

Original languageEnglish (US)
Article number024
Pages (from-to)6157-6163
Number of pages7
JournalJournal of Physics B: Atomic and Molecular Physics
Volume20
Issue number22
DOIs
StatePublished - 1987

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electron impact
light emission
dissociation
wavelengths
cross sections
fluorine
fragmentation
ions
fine structure
fragments
molecules

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

@article{d23cec1f3a7e4fed9a3819fdd86724fa,
title = "Optical emissions in the wavelength region 2000-6000 AA produced by electron impact dissociation of NF3, CF4 and SF 6",
abstract = "Light emissions in the wavelength region 2000-6000 AA produced by dissociative electron impact on CF4, NF3 and SF 6 were studied. A double-onset structure in the cross section of the intense continuous emission from CF4 was found and might be interpreted as evidence that excited CF3 + 3 fragment ions produced by two different mechanisms rather than CF 4 + parent ions are the emitting species. Comparatively weak fluorine 4p to 3 s line emissions resulting from the total fragmentation of the parent NF3 and SF6 molecules were also observed. In both cases the 2.4D to 4P multiplet at 3669 AA has the largest emission cross section with 4.4+or-1.2*10-20 cm 2 and 12.9+or-3.3*10-20 cm2 from SF 6 and NF3, respectively, at 100 eV. Four F II emissions with comparatively high onset potentials and maximum emission cross sections in the 10-20 cm2 range (at 200 eV) were found in the NF 3 spectrum but not in the SF6 spectrum. The break-up of both SF6 and NF3 leads to a broad unstructured emission between 2000 and 3200 AA which has not yet been identified.",
author = "Blanks, {K. A.} and K. Becker",
year = "1987",
doi = "10.1088/0022-3700/20/22/024",
language = "English (US)",
volume = "20",
pages = "6157--6163",
journal = "Journal of the Physics B: Atomic and Molecular Physics",
issn = "0022-3700",
publisher = "Institute of Physics",
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}

TY - JOUR

T1 - Optical emissions in the wavelength region 2000-6000 AA produced by electron impact dissociation of NF3, CF4 and SF 6

AU - Blanks, K. A.

AU - Becker, K.

PY - 1987

Y1 - 1987

N2 - Light emissions in the wavelength region 2000-6000 AA produced by dissociative electron impact on CF4, NF3 and SF 6 were studied. A double-onset structure in the cross section of the intense continuous emission from CF4 was found and might be interpreted as evidence that excited CF3 + 3 fragment ions produced by two different mechanisms rather than CF 4 + parent ions are the emitting species. Comparatively weak fluorine 4p to 3 s line emissions resulting from the total fragmentation of the parent NF3 and SF6 molecules were also observed. In both cases the 2.4D to 4P multiplet at 3669 AA has the largest emission cross section with 4.4+or-1.2*10-20 cm 2 and 12.9+or-3.3*10-20 cm2 from SF 6 and NF3, respectively, at 100 eV. Four F II emissions with comparatively high onset potentials and maximum emission cross sections in the 10-20 cm2 range (at 200 eV) were found in the NF 3 spectrum but not in the SF6 spectrum. The break-up of both SF6 and NF3 leads to a broad unstructured emission between 2000 and 3200 AA which has not yet been identified.

AB - Light emissions in the wavelength region 2000-6000 AA produced by dissociative electron impact on CF4, NF3 and SF 6 were studied. A double-onset structure in the cross section of the intense continuous emission from CF4 was found and might be interpreted as evidence that excited CF3 + 3 fragment ions produced by two different mechanisms rather than CF 4 + parent ions are the emitting species. Comparatively weak fluorine 4p to 3 s line emissions resulting from the total fragmentation of the parent NF3 and SF6 molecules were also observed. In both cases the 2.4D to 4P multiplet at 3669 AA has the largest emission cross section with 4.4+or-1.2*10-20 cm 2 and 12.9+or-3.3*10-20 cm2 from SF 6 and NF3, respectively, at 100 eV. Four F II emissions with comparatively high onset potentials and maximum emission cross sections in the 10-20 cm2 range (at 200 eV) were found in the NF 3 spectrum but not in the SF6 spectrum. The break-up of both SF6 and NF3 leads to a broad unstructured emission between 2000 and 3200 AA which has not yet been identified.

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U2 - 10.1088/0022-3700/20/22/024

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