On the nonlinear-flexural response of piezoelectrically driven microcantilever sensors

S. Nima Mahmoodi, Mohammed Daqaq, Nader Jalili

Research output: Contribution to journalArticle

Abstract

This paper undertakes a comprehensive analysis and detailed comparative study of two types of microcantilever sensors (MCS). The first configuration is actuated using a piezoelectric stack embedded under the sensor base yielding a base-type actuation while the second is actuated via a piezoelectric ZnO layer deposited on the surface of the sensor. Along these lines, a comprehensive distributed-parameters nonlinear model that includes both geometric and material nonlinearities is developed. The method of multiple scales is then implemented to study the asymptotic behavior of the sensors' response. Results demonstrate that each of the aforedescribed sensors exhibits a completely different nonlinear behavior. More specifically, similar to a base-excited macrocantilever, the first mode of a base-excited MCS has a hardening-type behavior. On the other hand, the first vibration mode of the piezoelectrically actuated MCS has a softening-type response. This softening behavior can be attributed to the presence of quadratic material nonlinearities in the piezoelectric layer (ZnO here). Such nonlinearities, which describe the nonlinear relation between the stress and strain in some piezoelectric materials are usually neglected in the modeling of piezoelectrically actuated macrocantilever beams. Here, we demonstrate by extensive theoretical development and experimental results that material nonlinearities associated with ZnO materials are large and have a considerable effect altering the response from the commonly expected hardening to the softening type. As such, it becomes evident that such detailed and comprehensive-nonlinear modeling effort is a key step towards the design and development of practical MCS.

Original languageEnglish (US)
Pages (from-to)171-179
Number of pages9
JournalSensors and Actuators, A: Physical
Volume153
Issue number2
DOIs
StatePublished - Aug 3 2009

Fingerprint

sensors
Sensors
nonlinearity
softening
hardening
Hardening
Piezoelectric materials
actuation
vibration mode
configurations

Keywords

  • Microcantilvever sensors
  • Nonlinear response
  • Piezoelectric layer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

On the nonlinear-flexural response of piezoelectrically driven microcantilever sensors. / Mahmoodi, S. Nima; Daqaq, Mohammed; Jalili, Nader.

In: Sensors and Actuators, A: Physical, Vol. 153, No. 2, 03.08.2009, p. 171-179.

Research output: Contribution to journalArticle

@article{cce842ef0a9a4518b4121da8f5081933,
title = "On the nonlinear-flexural response of piezoelectrically driven microcantilever sensors",
abstract = "This paper undertakes a comprehensive analysis and detailed comparative study of two types of microcantilever sensors (MCS). The first configuration is actuated using a piezoelectric stack embedded under the sensor base yielding a base-type actuation while the second is actuated via a piezoelectric ZnO layer deposited on the surface of the sensor. Along these lines, a comprehensive distributed-parameters nonlinear model that includes both geometric and material nonlinearities is developed. The method of multiple scales is then implemented to study the asymptotic behavior of the sensors' response. Results demonstrate that each of the aforedescribed sensors exhibits a completely different nonlinear behavior. More specifically, similar to a base-excited macrocantilever, the first mode of a base-excited MCS has a hardening-type behavior. On the other hand, the first vibration mode of the piezoelectrically actuated MCS has a softening-type response. This softening behavior can be attributed to the presence of quadratic material nonlinearities in the piezoelectric layer (ZnO here). Such nonlinearities, which describe the nonlinear relation between the stress and strain in some piezoelectric materials are usually neglected in the modeling of piezoelectrically actuated macrocantilever beams. Here, we demonstrate by extensive theoretical development and experimental results that material nonlinearities associated with ZnO materials are large and have a considerable effect altering the response from the commonly expected hardening to the softening type. As such, it becomes evident that such detailed and comprehensive-nonlinear modeling effort is a key step towards the design and development of practical MCS.",
keywords = "Microcantilvever sensors, Nonlinear response, Piezoelectric layer",
author = "Mahmoodi, {S. Nima} and Mohammed Daqaq and Nader Jalili",
year = "2009",
month = "8",
day = "3",
doi = "10.1016/j.sna.2009.05.003",
language = "English (US)",
volume = "153",
pages = "171--179",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",

}

TY - JOUR

T1 - On the nonlinear-flexural response of piezoelectrically driven microcantilever sensors

AU - Mahmoodi, S. Nima

AU - Daqaq, Mohammed

AU - Jalili, Nader

PY - 2009/8/3

Y1 - 2009/8/3

N2 - This paper undertakes a comprehensive analysis and detailed comparative study of two types of microcantilever sensors (MCS). The first configuration is actuated using a piezoelectric stack embedded under the sensor base yielding a base-type actuation while the second is actuated via a piezoelectric ZnO layer deposited on the surface of the sensor. Along these lines, a comprehensive distributed-parameters nonlinear model that includes both geometric and material nonlinearities is developed. The method of multiple scales is then implemented to study the asymptotic behavior of the sensors' response. Results demonstrate that each of the aforedescribed sensors exhibits a completely different nonlinear behavior. More specifically, similar to a base-excited macrocantilever, the first mode of a base-excited MCS has a hardening-type behavior. On the other hand, the first vibration mode of the piezoelectrically actuated MCS has a softening-type response. This softening behavior can be attributed to the presence of quadratic material nonlinearities in the piezoelectric layer (ZnO here). Such nonlinearities, which describe the nonlinear relation between the stress and strain in some piezoelectric materials are usually neglected in the modeling of piezoelectrically actuated macrocantilever beams. Here, we demonstrate by extensive theoretical development and experimental results that material nonlinearities associated with ZnO materials are large and have a considerable effect altering the response from the commonly expected hardening to the softening type. As such, it becomes evident that such detailed and comprehensive-nonlinear modeling effort is a key step towards the design and development of practical MCS.

AB - This paper undertakes a comprehensive analysis and detailed comparative study of two types of microcantilever sensors (MCS). The first configuration is actuated using a piezoelectric stack embedded under the sensor base yielding a base-type actuation while the second is actuated via a piezoelectric ZnO layer deposited on the surface of the sensor. Along these lines, a comprehensive distributed-parameters nonlinear model that includes both geometric and material nonlinearities is developed. The method of multiple scales is then implemented to study the asymptotic behavior of the sensors' response. Results demonstrate that each of the aforedescribed sensors exhibits a completely different nonlinear behavior. More specifically, similar to a base-excited macrocantilever, the first mode of a base-excited MCS has a hardening-type behavior. On the other hand, the first vibration mode of the piezoelectrically actuated MCS has a softening-type response. This softening behavior can be attributed to the presence of quadratic material nonlinearities in the piezoelectric layer (ZnO here). Such nonlinearities, which describe the nonlinear relation between the stress and strain in some piezoelectric materials are usually neglected in the modeling of piezoelectrically actuated macrocantilever beams. Here, we demonstrate by extensive theoretical development and experimental results that material nonlinearities associated with ZnO materials are large and have a considerable effect altering the response from the commonly expected hardening to the softening type. As such, it becomes evident that such detailed and comprehensive-nonlinear modeling effort is a key step towards the design and development of practical MCS.

KW - Microcantilvever sensors

KW - Nonlinear response

KW - Piezoelectric layer

UR - http://www.scopus.com/inward/record.url?scp=67649418420&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=67649418420&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2009.05.003

DO - 10.1016/j.sna.2009.05.003

M3 - Article

AN - SCOPUS:67649418420

VL - 153

SP - 171

EP - 179

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 2

ER -