Novel polyol-derived sol route for fabrication of PZT thin ferroelectric films

Q. Zou, Said Nourbakhsh, J. Kim

Research output: Contribution to journalArticle

Abstract

A novel polyol based metalorganic route has been developed and employed to deposit PZT thin films on Pt/Ti/SiO2/Si substrates by sol-gel processing. Differential thermal analysis (DTA), thermogravimetric analysis (TGA). Fourier transform infrared (FTIR), and X-ray diffraction collectively indicated PZT with perovskite phase structure was formed at approximately 550°C which is approximate 100°C lower than that in metal-alkoxide routes. The films are crackfree and have single perovskite phase structure with columnar crystals perpendicular to the substrate plane. The pyrolysis effect on microstructure and ferroelectric properties of the film was investigated. PZT film, which was pyrolyzed at 450°C and then annealed at 550°C for 1 h, has the coercive field of 60 kV/cm, the remnant polarization of 14 μC/cm2, the spontaneous polarization of 47.5 μC/cm2 and the switching voltage of 6 V.

Original languageEnglish (US)
Pages (from-to)240-245
Number of pages6
JournalMaterials Letters
Volume40
Issue number5
DOIs
StatePublished - Sep 1999

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Ferroelectric thin films
Polyols
Polymethyl Methacrylate
Sols
routes
Phase structure
Fabrication
Perovskite
fabrication
Polarization
alkoxides
Substrates
polarization
Differential thermal analysis
Ferroelectric materials
Sol-gels
pyrolysis
Thermogravimetric analysis
Fourier transforms
thermal analysis

ASJC Scopus subject areas

  • Materials Science(all)

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Novel polyol-derived sol route for fabrication of PZT thin ferroelectric films. / Zou, Q.; Nourbakhsh, Said; Kim, J.

In: Materials Letters, Vol. 40, No. 5, 09.1999, p. 240-245.

Research output: Contribution to journalArticle

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