Novel methods for nanolithography

Christopher Harrison, Miri Park, Paul Chaikin, Richard A. Register, Douglas H. Adamson

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.

    Original languageEnglish (US)
    Title of host publicationAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
    EditorsB.M. Culbertson
    PublisherACS
    Pages821-822
    Number of pages2
    Volume37
    Edition2
    StatePublished - Aug 1996
    EventProceedings of the 1996 ACS Orlando Meeting - Orlando, FL, USA
    Duration: Aug 25 1996Aug 29 1996

    Other

    OtherProceedings of the 1996 ACS Orlando Meeting
    CityOrlando, FL, USA
    Period8/25/968/29/96

    Fingerprint

    Nanolithography
    Spin coating
    Toluene
    Plastic films
    Thin films
    Casting
    Coating techniques
    Water
    Deionized water
    Nanotechnology
    Evaporation

    ASJC Scopus subject areas

    • Polymers and Plastics

    Cite this

    Harrison, C., Park, M., Chaikin, P., Register, R. A., & Adamson, D. H. (1996). Novel methods for nanolithography. In B. M. Culbertson (Ed.), American Chemical Society, Polymer Preprints, Division of Polymer Chemistry (2 ed., Vol. 37, pp. 821-822). ACS.

    Novel methods for nanolithography. / Harrison, Christopher; Park, Miri; Chaikin, Paul; Register, Richard A.; Adamson, Douglas H.

    American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. ed. / B.M. Culbertson. Vol. 37 2. ed. ACS, 1996. p. 821-822.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Harrison, C, Park, M, Chaikin, P, Register, RA & Adamson, DH 1996, Novel methods for nanolithography. in BM Culbertson (ed.), American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. 2 edn, vol. 37, ACS, pp. 821-822, Proceedings of the 1996 ACS Orlando Meeting, Orlando, FL, USA, 8/25/96.
    Harrison C, Park M, Chaikin P, Register RA, Adamson DH. Novel methods for nanolithography. In Culbertson BM, editor, American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. 2 ed. Vol. 37. ACS. 1996. p. 821-822
    Harrison, Christopher ; Park, Miri ; Chaikin, Paul ; Register, Richard A. ; Adamson, Douglas H. / Novel methods for nanolithography. American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. editor / B.M. Culbertson. Vol. 37 2. ed. ACS, 1996. pp. 821-822
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