Novel metalorganic route for fabrication of BaTiO3 thin ferroelectric films

Said Nourbakhsh, I. Vasilyeva, J. N. Carter

Research output: Contribution to journalArticle

Abstract

A novel diol based metalorganic route has been developed and employed to deposit BaTiO3 films on Si and Pt coated Si substrates. Differential thermal analysis, thermogravimetric analysis, x-ray photoelectron spectroscopy, and x-ray diffraction collectively indicated that BaTiO3 was formed through the reaction of Ba and Ti oxides at approximately 500°C. The films were single phase, had no crystallographic texture, and contained no detectable impurities.

Original languageEnglish (US)
Pages (from-to)2804
Number of pages1
JournalApplied Physics Letters
StatePublished - 1995

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routes
fabrication
x ray spectroscopy
thermal analysis
x ray diffraction
textures
deposits
photoelectron spectroscopy
impurities
oxides

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Novel metalorganic route for fabrication of BaTiO3 thin ferroelectric films. / Nourbakhsh, Said; Vasilyeva, I.; Carter, J. N.

In: Applied Physics Letters, 1995, p. 2804.

Research output: Contribution to journalArticle

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