Nanolithographic templates from diblock copolymer thin films

P. Mansky, C. K. Harrison, P. M. Chaikin, R. A. Register, N. Yao

    Research output: Contribution to journalArticle

    Abstract

    We describe a technique for creating a thin polystyrene film containing a periodic array of cylindrical holes, with a hole size of approximately 13 nm and a lattice constant of 27 nm. The starting material is a polystyrene- polybutadiene diblock copolymer, which self-assembles into a hexagonally packed array of polybutadiene cylinders embedded in a polystyrene matrix. A technique described previously is used to orient the cylinders normal to the plane of the film. The polybutadiene domains are then removed by reaction with ozone, which attacks the double bonds in the polybutadiene backbone. Films of this type could potentially be used as templates for nanolithography on a scale not readily accessed by other techniques.

    Original languageEnglish (US)
    Pages (from-to)2586
    Number of pages1
    JournalApplied Physics Letters
    DOIs
    StatePublished - 1995

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    polybutadiene
    copolymers
    templates
    polystyrene
    thin films
    attack
    ozone
    matrices

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Cite this

    Mansky, P., Harrison, C. K., Chaikin, P. M., Register, R. A., & Yao, N. (1995). Nanolithographic templates from diblock copolymer thin films. Applied Physics Letters, 2586. https://doi.org/10.1063/1.116192

    Nanolithographic templates from diblock copolymer thin films. / Mansky, P.; Harrison, C. K.; Chaikin, P. M.; Register, R. A.; Yao, N.

    In: Applied Physics Letters, 1995, p. 2586.

    Research output: Contribution to journalArticle

    Mansky, P, Harrison, CK, Chaikin, PM, Register, RA & Yao, N 1995, 'Nanolithographic templates from diblock copolymer thin films', Applied Physics Letters, pp. 2586. https://doi.org/10.1063/1.116192
    Mansky, P. ; Harrison, C. K. ; Chaikin, P. M. ; Register, R. A. ; Yao, N. / Nanolithographic templates from diblock copolymer thin films. In: Applied Physics Letters. 1995 ; pp. 2586.
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