Multi-parametric H∞ control of a micro-actuator

Antonios Tzes, George Nikolakopoulos, Leonidas Dritsas, Yiannis Koveos

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    in this article the control problem of a micro-actuator (μ - A) is considered. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible plate's motion is constrained by hinges acting as a combination of springs and dashpots. The distance of the plates is varied by the applied voltage between them. The flexibility of the moving plate coupled to the dynamics of the plate's rigid-body motion results in an unstable, nonlinear system of distributed nature. Utilization of FEM can approximate the μ - A dynamics nonlinear-PDE to a finite nonlinear-ODE. The nonlinearity stems from the plate's rigid-body motion, while all flexibility effects are considered as additive linear-terms. A controller composed of: a) a feedforward term for regulation at selected setpoints, and b) a constrained finite time optimal controller to handle any deviations from the equilibrium is synthesized. Simulation studies are used to investigate the efficacy of the suggested controller

    Original languageEnglish (US)
    Title of host publicationProceedings of the 16th IFAC World Congress, IFAC 2005
    Pages964-969
    Number of pages6
    Volume16
    StatePublished - Dec 1 2005
    Event16th Triennial World Congress of International Federation of Automatic Control, IFAC 2005 - Prague, Czech Republic
    Duration: Jul 3 2005Jul 8 2005

    Other

    Other16th Triennial World Congress of International Federation of Automatic Control, IFAC 2005
    CountryCzech Republic
    CityPrague
    Period7/3/057/8/05

    Fingerprint

    Actuators
    Controllers
    Hinges
    Nonlinear systems
    Capacitors
    Finite element method
    Electric potential

    Keywords

    • MEMs
    • Micro-actuator
    • Optimal control

    ASJC Scopus subject areas

    • Control and Systems Engineering

    Cite this

    Tzes, A., Nikolakopoulos, G., Dritsas, L., & Koveos, Y. (2005). Multi-parametric H∞ control of a micro-actuator. In Proceedings of the 16th IFAC World Congress, IFAC 2005 (Vol. 16, pp. 964-969)

    Multi-parametric H∞ control of a micro-actuator. / Tzes, Antonios; Nikolakopoulos, George; Dritsas, Leonidas; Koveos, Yiannis.

    Proceedings of the 16th IFAC World Congress, IFAC 2005. Vol. 16 2005. p. 964-969.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Tzes, A, Nikolakopoulos, G, Dritsas, L & Koveos, Y 2005, Multi-parametric H∞ control of a micro-actuator. in Proceedings of the 16th IFAC World Congress, IFAC 2005. vol. 16, pp. 964-969, 16th Triennial World Congress of International Federation of Automatic Control, IFAC 2005, Prague, Czech Republic, 7/3/05.
    Tzes A, Nikolakopoulos G, Dritsas L, Koveos Y. Multi-parametric H∞ control of a micro-actuator. In Proceedings of the 16th IFAC World Congress, IFAC 2005. Vol. 16. 2005. p. 964-969
    Tzes, Antonios ; Nikolakopoulos, George ; Dritsas, Leonidas ; Koveos, Yiannis. / Multi-parametric H∞ control of a micro-actuator. Proceedings of the 16th IFAC World Congress, IFAC 2005. Vol. 16 2005. pp. 964-969
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