Multi-parametric H∞ control of a micro-actuator

Antonios Tzes, George Nikolakopoulos, Leonidas Dritsas, Yiannis Koveos

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

in this article the control problem of a micro-actuator (μ - A) is considered. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible plate's motion is constrained by hinges acting as a combination of springs and dashpots. The distance of the plates is varied by the applied voltage between them. The flexibility of the moving plate coupled to the dynamics of the plate's rigid-body motion results in an unstable, nonlinear system of distributed nature. Utilization of FEM can approximate the μ - A dynamics nonlinear-PDE to a finite nonlinear-ODE. The nonlinearity stems from the plate's rigid-body motion, while all flexibility effects are considered as additive linear-terms. A controller composed of: a) a feedforward term for regulation at selected setpoints, and b) a constrained finite time optimal controller to handle any deviations from the equilibrium is synthesized. Simulation studies are used to investigate the efficacy of the suggested controller

Original languageEnglish (US)
Title of host publicationProceedings of the 16th IFAC World Congress, IFAC 2005
Pages964-969
Number of pages6
Volume16
StatePublished - Dec 1 2005
Event16th Triennial World Congress of International Federation of Automatic Control, IFAC 2005 - Prague, Czech Republic
Duration: Jul 3 2005Jul 8 2005

Other

Other16th Triennial World Congress of International Federation of Automatic Control, IFAC 2005
CountryCzech Republic
CityPrague
Period7/3/057/8/05

Fingerprint

Actuators
Controllers
Hinges
Nonlinear systems
Capacitors
Finite element method
Electric potential

Keywords

  • MEMs
  • Micro-actuator
  • Optimal control

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Tzes, A., Nikolakopoulos, G., Dritsas, L., & Koveos, Y. (2005). Multi-parametric H∞ control of a micro-actuator. In Proceedings of the 16th IFAC World Congress, IFAC 2005 (Vol. 16, pp. 964-969)

Multi-parametric H∞ control of a micro-actuator. / Tzes, Antonios; Nikolakopoulos, George; Dritsas, Leonidas; Koveos, Yiannis.

Proceedings of the 16th IFAC World Congress, IFAC 2005. Vol. 16 2005. p. 964-969.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tzes, A, Nikolakopoulos, G, Dritsas, L & Koveos, Y 2005, Multi-parametric H∞ control of a micro-actuator. in Proceedings of the 16th IFAC World Congress, IFAC 2005. vol. 16, pp. 964-969, 16th Triennial World Congress of International Federation of Automatic Control, IFAC 2005, Prague, Czech Republic, 7/3/05.
Tzes A, Nikolakopoulos G, Dritsas L, Koveos Y. Multi-parametric H∞ control of a micro-actuator. In Proceedings of the 16th IFAC World Congress, IFAC 2005. Vol. 16. 2005. p. 964-969
Tzes, Antonios ; Nikolakopoulos, George ; Dritsas, Leonidas ; Koveos, Yiannis. / Multi-parametric H∞ control of a micro-actuator. Proceedings of the 16th IFAC World Congress, IFAC 2005. Vol. 16 2005. pp. 964-969
@inproceedings{b08847c7a613494ab36c77a5c97ed937,
title = "Multi-parametric H∞ control of a micro-actuator",
abstract = "in this article the control problem of a micro-actuator (μ - A) is considered. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible plate's motion is constrained by hinges acting as a combination of springs and dashpots. The distance of the plates is varied by the applied voltage between them. The flexibility of the moving plate coupled to the dynamics of the plate's rigid-body motion results in an unstable, nonlinear system of distributed nature. Utilization of FEM can approximate the μ - A dynamics nonlinear-PDE to a finite nonlinear-ODE. The nonlinearity stems from the plate's rigid-body motion, while all flexibility effects are considered as additive linear-terms. A controller composed of: a) a feedforward term for regulation at selected setpoints, and b) a constrained finite time optimal controller to handle any deviations from the equilibrium is synthesized. Simulation studies are used to investigate the efficacy of the suggested controller",
keywords = "MEMs, Micro-actuator, Optimal control",
author = "Antonios Tzes and George Nikolakopoulos and Leonidas Dritsas and Yiannis Koveos",
year = "2005",
month = "12",
day = "1",
language = "English (US)",
isbn = "008045108X",
volume = "16",
pages = "964--969",
booktitle = "Proceedings of the 16th IFAC World Congress, IFAC 2005",

}

TY - GEN

T1 - Multi-parametric H∞ control of a micro-actuator

AU - Tzes, Antonios

AU - Nikolakopoulos, George

AU - Dritsas, Leonidas

AU - Koveos, Yiannis

PY - 2005/12/1

Y1 - 2005/12/1

N2 - in this article the control problem of a micro-actuator (μ - A) is considered. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible plate's motion is constrained by hinges acting as a combination of springs and dashpots. The distance of the plates is varied by the applied voltage between them. The flexibility of the moving plate coupled to the dynamics of the plate's rigid-body motion results in an unstable, nonlinear system of distributed nature. Utilization of FEM can approximate the μ - A dynamics nonlinear-PDE to a finite nonlinear-ODE. The nonlinearity stems from the plate's rigid-body motion, while all flexibility effects are considered as additive linear-terms. A controller composed of: a) a feedforward term for regulation at selected setpoints, and b) a constrained finite time optimal controller to handle any deviations from the equilibrium is synthesized. Simulation studies are used to investigate the efficacy of the suggested controller

AB - in this article the control problem of a micro-actuator (μ - A) is considered. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible plate's motion is constrained by hinges acting as a combination of springs and dashpots. The distance of the plates is varied by the applied voltage between them. The flexibility of the moving plate coupled to the dynamics of the plate's rigid-body motion results in an unstable, nonlinear system of distributed nature. Utilization of FEM can approximate the μ - A dynamics nonlinear-PDE to a finite nonlinear-ODE. The nonlinearity stems from the plate's rigid-body motion, while all flexibility effects are considered as additive linear-terms. A controller composed of: a) a feedforward term for regulation at selected setpoints, and b) a constrained finite time optimal controller to handle any deviations from the equilibrium is synthesized. Simulation studies are used to investigate the efficacy of the suggested controller

KW - MEMs

KW - Micro-actuator

KW - Optimal control

UR - http://www.scopus.com/inward/record.url?scp=79960743212&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79960743212&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:79960743212

SN - 008045108X

SN - 9780080451084

VL - 16

SP - 964

EP - 969

BT - Proceedings of the 16th IFAC World Congress, IFAC 2005

ER -