Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge using circular TM11 mode fields

S.C. Kuo, Spencer Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationAppl. Diamond Films, 3rd Int. Conference
Pages669-672
StatePublished - 1995

Cite this

Kuo, S. C., & Kuo, S. (1995). Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge using circular TM11 mode fields. In Appl. Diamond Films, 3rd Int. Conference (pp. 669-672)