Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge using circular TM11 mode fields

S.C. Kuo, Spencer Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationAppl. Diamond Films, 3rd Int. Conference
Pages669-672
StatePublished - 1995

Cite this

Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge using circular TM11 mode fields. / Kuo, S.C.; Kuo, Spencer.

Appl. Diamond Films, 3rd Int. Conference. 1995. p. 669-672.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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year = "1995",
language = "English (US)",
pages = "669--672",
booktitle = "Appl. Diamond Films, 3rd Int. Conference",

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T1 - Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge using circular TM11 mode fields

AU - Kuo, S.C.

AU - Kuo, Spencer

PY - 1995

Y1 - 1995

M3 - Conference contribution

SP - 669

EP - 672

BT - Appl. Diamond Films, 3rd Int. Conference

ER -