Modification and application of an emission microscope for continuous wavelength spectroscopy

Mahmoud Rasras, I. De Wolf, G. Groeseneken, H. E. Maes

Research output: Contribution to journalArticle

Abstract

A simple, cost effective, and highly sensitive spectroscopic technique for photon emission microscopy is proposed (SPEMMI). In contrast to earlier reported systems, this new system uses only one detector for both conventional failure localisation and spectral analysis. To demonstrate the functionality of the SPEMMI, emission spectra from forward and reversed biased diodes, and from a poly-Si resistor are presented. In addition, it is shown that the instrument allows fast determination, with μm resolution, of the temperature profile of devices.

Original languageEnglish (US)
Pages (from-to)1595-1598
Number of pages4
JournalMicroelectronics Reliability
Volume37
Issue number10-11
DOIs
StatePublished - Jan 1 1997

Fingerprint

Microscopic examination
Microscopes
Photons
microscopes
Spectroscopy
microscopy
Wavelength
photons
Polysilicon
wavelengths
resistors
Resistors
temperature profiles
Spectrum analysis
spectroscopy
Failure analysis
spectrum analysis
Diodes
emission spectra
diodes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Safety, Risk, Reliability and Quality
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Modification and application of an emission microscope for continuous wavelength spectroscopy. / Rasras, Mahmoud; De Wolf, I.; Groeseneken, G.; Maes, H. E.

In: Microelectronics Reliability, Vol. 37, No. 10-11, 01.01.1997, p. 1595-1598.

Research output: Contribution to journalArticle

Rasras, Mahmoud ; De Wolf, I. ; Groeseneken, G. ; Maes, H. E. / Modification and application of an emission microscope for continuous wavelength spectroscopy. In: Microelectronics Reliability. 1997 ; Vol. 37, No. 10-11. pp. 1595-1598.
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