Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

Marialena Vagia, Antonios Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article the modeling aspects of an electro-static microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.

Original languageEnglish (US)
Title of host publication2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08
Pages469-474
Number of pages6
DOIs
StatePublished - Oct 6 2008
Event2008 Mediterranean Conference on Control and Automation, MED'08 - Ajaccio-Corsica, France
Duration: Jun 25 2008Jun 27 2008

Other

Other2008 Mediterranean Conference on Control and Automation, MED'08
CountryFrance
CityAjaccio-Corsica
Period6/25/086/27/08

Fingerprint

Microactuators
Electrostatics
Damping
Air
Dynamic models
Actuators
Thin films

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Vagia, M., & Tzes, A. (2008). Modeling and analysis of the squeezed film damping effect on electrostatic microactuators. In 2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08 (pp. 469-474). [4602247] https://doi.org/10.1109/MED.2008.4602247

Modeling and analysis of the squeezed film damping effect on electrostatic microactuators. / Vagia, Marialena; Tzes, Antonios.

2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08. 2008. p. 469-474 4602247.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Vagia, M & Tzes, A 2008, Modeling and analysis of the squeezed film damping effect on electrostatic microactuators. in 2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08., 4602247, pp. 469-474, 2008 Mediterranean Conference on Control and Automation, MED'08, Ajaccio-Corsica, France, 6/25/08. https://doi.org/10.1109/MED.2008.4602247
Vagia M, Tzes A. Modeling and analysis of the squeezed film damping effect on electrostatic microactuators. In 2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08. 2008. p. 469-474. 4602247 https://doi.org/10.1109/MED.2008.4602247
Vagia, Marialena ; Tzes, Antonios. / Modeling and analysis of the squeezed film damping effect on electrostatic microactuators. 2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08. 2008. pp. 469-474
@inproceedings{394c6b6decbd4174910a239514281cff,
title = "Modeling and analysis of the squeezed film damping effect on electrostatic microactuators",
abstract = "In this article the modeling aspects of an electro-static microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.",
author = "Marialena Vagia and Antonios Tzes",
year = "2008",
month = "10",
day = "6",
doi = "10.1109/MED.2008.4602247",
language = "English (US)",
isbn = "9781424425051",
pages = "469--474",
booktitle = "2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08",

}

TY - GEN

T1 - Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

AU - Vagia, Marialena

AU - Tzes, Antonios

PY - 2008/10/6

Y1 - 2008/10/6

N2 - In this article the modeling aspects of an electro-static microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.

AB - In this article the modeling aspects of an electro-static microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.

UR - http://www.scopus.com/inward/record.url?scp=52949101734&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=52949101734&partnerID=8YFLogxK

U2 - 10.1109/MED.2008.4602247

DO - 10.1109/MED.2008.4602247

M3 - Conference contribution

SN - 9781424425051

SP - 469

EP - 474

BT - 2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08

ER -