Abstract
A micromachined fluidic sensor array for the rapid characterization of multiple analytes in solution has been developed. A simple micromachined fluidic structure for this biological and chemical agent detection system has been designed and fabricated, and the system has been tested. Sensing occurs via optical changes to indicator molecules that are attached to polymeric microspheres (beads). A separate charged-coupled-device (CCD) is used for the simultaneous acquisition of the optical data from the selectively arranged beads in micromachined etch cavities. The micromachined bead support structure has been designed to be compatible with this hybrid optical detection system. The structure consists of four layers: cover glass, micromachined silicon, dry film photoresist, and glass substrate. The bottom three layers are fabricated first, and the beads are selectively placed into micromachined etch cavities. Finally, the cover glass is applied to confine the beads. This structure utilizes a hydrophilic surface of the cover glass to draw a liquid sample into the sensor array without moving components, producing a compact, reliable, and potentially low-cost device. We have initially characterized fluid flow through a complete chip, showing complete filling of the sample chamber in approximately 2 seconds. The test results show that this system may be useful in micro total analysis systems (μ-TAS), especially in single-use biomedical applications.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Publisher | Society of Photo-Optical Instrumentation Engineers |
| Pages | 212-219 |
| Number of pages | 8 |
| Volume | 4177 |
| State | Published - 2000 |
| Event | Microfluidic Devices and Systems III - Santa Clara, CA, USA Duration: Sep 18 2000 → Sep 19 2000 |
Other
| Other | Microfluidic Devices and Systems III |
|---|---|
| City | Santa Clara, CA, USA |
| Period | 9/18/00 → 9/19/00 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Liquid flow through an array-based chemical sensing system. / Sohn, Young Soo; Tsao, Andrew; Anslyn, Eric; McDevitt, John; Shear, Jason B.; Neikirk, Dean P.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4177 Society of Photo-Optical Instrumentation Engineers, 2000. p. 212-219.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Liquid flow through an array-based chemical sensing system
AU - Sohn, Young Soo
AU - Tsao, Andrew
AU - Anslyn, Eric
AU - McDevitt, John
AU - Shear, Jason B.
AU - Neikirk, Dean P.
PY - 2000
Y1 - 2000
N2 - A micromachined fluidic sensor array for the rapid characterization of multiple analytes in solution has been developed. A simple micromachined fluidic structure for this biological and chemical agent detection system has been designed and fabricated, and the system has been tested. Sensing occurs via optical changes to indicator molecules that are attached to polymeric microspheres (beads). A separate charged-coupled-device (CCD) is used for the simultaneous acquisition of the optical data from the selectively arranged beads in micromachined etch cavities. The micromachined bead support structure has been designed to be compatible with this hybrid optical detection system. The structure consists of four layers: cover glass, micromachined silicon, dry film photoresist, and glass substrate. The bottom three layers are fabricated first, and the beads are selectively placed into micromachined etch cavities. Finally, the cover glass is applied to confine the beads. This structure utilizes a hydrophilic surface of the cover glass to draw a liquid sample into the sensor array without moving components, producing a compact, reliable, and potentially low-cost device. We have initially characterized fluid flow through a complete chip, showing complete filling of the sample chamber in approximately 2 seconds. The test results show that this system may be useful in micro total analysis systems (μ-TAS), especially in single-use biomedical applications.
AB - A micromachined fluidic sensor array for the rapid characterization of multiple analytes in solution has been developed. A simple micromachined fluidic structure for this biological and chemical agent detection system has been designed and fabricated, and the system has been tested. Sensing occurs via optical changes to indicator molecules that are attached to polymeric microspheres (beads). A separate charged-coupled-device (CCD) is used for the simultaneous acquisition of the optical data from the selectively arranged beads in micromachined etch cavities. The micromachined bead support structure has been designed to be compatible with this hybrid optical detection system. The structure consists of four layers: cover glass, micromachined silicon, dry film photoresist, and glass substrate. The bottom three layers are fabricated first, and the beads are selectively placed into micromachined etch cavities. Finally, the cover glass is applied to confine the beads. This structure utilizes a hydrophilic surface of the cover glass to draw a liquid sample into the sensor array without moving components, producing a compact, reliable, and potentially low-cost device. We have initially characterized fluid flow through a complete chip, showing complete filling of the sample chamber in approximately 2 seconds. The test results show that this system may be useful in micro total analysis systems (μ-TAS), especially in single-use biomedical applications.
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UR - http://www.scopus.com/inward/citedby.url?scp=0034541717&partnerID=8YFLogxK
M3 - Conference contribution
VL - 4177
SP - 212
EP - 219
BT - Proceedings of SPIE - The International Society for Optical Engineering
PB - Society of Photo-Optical Instrumentation Engineers
ER -