Liquid flow through an array-based chemical sensing system

Young Soo Sohn, Andrew Tsao, Eric Anslyn, John McDevitt, Jason B. Shear, Dean P. Neikirk

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A micromachined fluidic sensor array for the rapid characterization of multiple analytes in solution has been developed. A simple micromachined fluidic structure for this biological and chemical agent detection system has been designed and fabricated, and the system has been tested. Sensing occurs via optical changes to indicator molecules that are attached to polymeric microspheres (beads). A separate charged-coupled-device (CCD) is used for the simultaneous acquisition of the optical data from the selectively arranged beads in micromachined etch cavities. The micromachined bead support structure has been designed to be compatible with this hybrid optical detection system. The structure consists of four layers: cover glass, micromachined silicon, dry film photoresist, and glass substrate. The bottom three layers are fabricated first, and the beads are selectively placed into micromachined etch cavities. Finally, the cover glass is applied to confine the beads. This structure utilizes a hydrophilic surface of the cover glass to draw a liquid sample into the sensor array without moving components, producing a compact, reliable, and potentially low-cost device. We have initially characterized fluid flow through a complete chip, showing complete filling of the sample chamber in approximately 2 seconds. The test results show that this system may be useful in micro total analysis systems (μ-TAS), especially in single-use biomedical applications.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages212-219
Number of pages8
Volume4177
StatePublished - 2000
EventMicrofluidic Devices and Systems III - Santa Clara, CA, USA
Duration: Sep 18 2000Sep 19 2000

Other

OtherMicrofluidic Devices and Systems III
CitySanta Clara, CA, USA
Period9/18/009/19/00

Fingerprint

liquid flow
beads
Glass
Sensor arrays
Liquids
Fluidics
glass
fluidics
Photoresists
Microspheres
cavities
sensors
systems analysis
Flow of fluids
photoresists
fluid flow
acquisition
Silicon
chambers
Molecules

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Sohn, Y. S., Tsao, A., Anslyn, E., McDevitt, J., Shear, J. B., & Neikirk, D. P. (2000). Liquid flow through an array-based chemical sensing system. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4177, pp. 212-219). Society of Photo-Optical Instrumentation Engineers.

Liquid flow through an array-based chemical sensing system. / Sohn, Young Soo; Tsao, Andrew; Anslyn, Eric; McDevitt, John; Shear, Jason B.; Neikirk, Dean P.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4177 Society of Photo-Optical Instrumentation Engineers, 2000. p. 212-219.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sohn, YS, Tsao, A, Anslyn, E, McDevitt, J, Shear, JB & Neikirk, DP 2000, Liquid flow through an array-based chemical sensing system. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 4177, Society of Photo-Optical Instrumentation Engineers, pp. 212-219, Microfluidic Devices and Systems III, Santa Clara, CA, USA, 9/18/00.
Sohn YS, Tsao A, Anslyn E, McDevitt J, Shear JB, Neikirk DP. Liquid flow through an array-based chemical sensing system. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4177. Society of Photo-Optical Instrumentation Engineers. 2000. p. 212-219
Sohn, Young Soo ; Tsao, Andrew ; Anslyn, Eric ; McDevitt, John ; Shear, Jason B. ; Neikirk, Dean P. / Liquid flow through an array-based chemical sensing system. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4177 Society of Photo-Optical Instrumentation Engineers, 2000. pp. 212-219
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