Laser light scattering from silicon particles generated in an argon diluted silane plasma

Y. Qin, U. R. Kortshagen, Eray Aydil

Research output: Contribution to journalArticle

Abstract

We conducted laser light scattering (LLS) measurements in a 13.56 MHz capacitively coupled dusty plasma maintained in silane and argon to study the spatial distribution of silicon nanoparticles and nanoparticle agglomerates. Specifically, we focused on the temporal evolution of their spatial distribution in the plasma as a function of pressure and power. We observed three distinct types of temporal evolution behavior of the nanoparticle dust cloud in the plasma and classified these into three regimes based on pressure and power. Each regime features a distinct pattern in laser light scattering measurements. At low pressures (∼80-100 mTorr) and high powers (∼40-60 W) we observed periodically repeating expansions and contractions of a continuous dust cloud for the first time. Dust voids, which have been reported before, were also observed at high pressures (∼100-150 mTorr) and low powers (∼20-40 W) in the center of the plasma. A mechanism is proposed to explain the observed dynamics of the nanoparticles. The balance between the ion drag force and electrostatic forces and their dependence on particle size are hypothesized to be the dominant factors that determine the nanoparticle cloud dynamics.

Original languageEnglish (US)
Article number085203
Pages (from-to)1DUMMY
JournalJournal of Physics D: Applied Physics
Volume49
Issue number8
DOIs
StatePublished - Jan 27 2016

Fingerprint

Silanes
Argon
Silicon
silanes
Light scattering
light scattering
argon
Nanoparticles
Plasmas
nanoparticles
Lasers
silicon
Dust
dust
lasers
Spatial distribution
spatial distribution
Electrostatic force
dusty plasmas
drag

Keywords

  • dusty plasma
  • laser light scattering
  • nanoparticle cloud dynamics
  • spatiotemporal distribution of nanoparticles

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

Cite this

Laser light scattering from silicon particles generated in an argon diluted silane plasma. / Qin, Y.; Kortshagen, U. R.; Aydil, Eray.

In: Journal of Physics D: Applied Physics, Vol. 49, No. 8, 085203, 27.01.2016, p. 1DUMMY.

Research output: Contribution to journalArticle

@article{0fcfce4f23464327a88fd50455cebc72,
title = "Laser light scattering from silicon particles generated in an argon diluted silane plasma",
abstract = "We conducted laser light scattering (LLS) measurements in a 13.56 MHz capacitively coupled dusty plasma maintained in silane and argon to study the spatial distribution of silicon nanoparticles and nanoparticle agglomerates. Specifically, we focused on the temporal evolution of their spatial distribution in the plasma as a function of pressure and power. We observed three distinct types of temporal evolution behavior of the nanoparticle dust cloud in the plasma and classified these into three regimes based on pressure and power. Each regime features a distinct pattern in laser light scattering measurements. At low pressures (∼80-100 mTorr) and high powers (∼40-60 W) we observed periodically repeating expansions and contractions of a continuous dust cloud for the first time. Dust voids, which have been reported before, were also observed at high pressures (∼100-150 mTorr) and low powers (∼20-40 W) in the center of the plasma. A mechanism is proposed to explain the observed dynamics of the nanoparticles. The balance between the ion drag force and electrostatic forces and their dependence on particle size are hypothesized to be the dominant factors that determine the nanoparticle cloud dynamics.",
keywords = "dusty plasma, laser light scattering, nanoparticle cloud dynamics, spatiotemporal distribution of nanoparticles",
author = "Y. Qin and Kortshagen, {U. R.} and Eray Aydil",
year = "2016",
month = "1",
day = "27",
doi = "10.1088/0022-3727/49/8/085203",
language = "English (US)",
volume = "49",
pages = "1DUMMY",
journal = "Journal Physics D: Applied Physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",
number = "8",

}

TY - JOUR

T1 - Laser light scattering from silicon particles generated in an argon diluted silane plasma

AU - Qin, Y.

AU - Kortshagen, U. R.

AU - Aydil, Eray

PY - 2016/1/27

Y1 - 2016/1/27

N2 - We conducted laser light scattering (LLS) measurements in a 13.56 MHz capacitively coupled dusty plasma maintained in silane and argon to study the spatial distribution of silicon nanoparticles and nanoparticle agglomerates. Specifically, we focused on the temporal evolution of their spatial distribution in the plasma as a function of pressure and power. We observed three distinct types of temporal evolution behavior of the nanoparticle dust cloud in the plasma and classified these into three regimes based on pressure and power. Each regime features a distinct pattern in laser light scattering measurements. At low pressures (∼80-100 mTorr) and high powers (∼40-60 W) we observed periodically repeating expansions and contractions of a continuous dust cloud for the first time. Dust voids, which have been reported before, were also observed at high pressures (∼100-150 mTorr) and low powers (∼20-40 W) in the center of the plasma. A mechanism is proposed to explain the observed dynamics of the nanoparticles. The balance between the ion drag force and electrostatic forces and their dependence on particle size are hypothesized to be the dominant factors that determine the nanoparticle cloud dynamics.

AB - We conducted laser light scattering (LLS) measurements in a 13.56 MHz capacitively coupled dusty plasma maintained in silane and argon to study the spatial distribution of silicon nanoparticles and nanoparticle agglomerates. Specifically, we focused on the temporal evolution of their spatial distribution in the plasma as a function of pressure and power. We observed three distinct types of temporal evolution behavior of the nanoparticle dust cloud in the plasma and classified these into three regimes based on pressure and power. Each regime features a distinct pattern in laser light scattering measurements. At low pressures (∼80-100 mTorr) and high powers (∼40-60 W) we observed periodically repeating expansions and contractions of a continuous dust cloud for the first time. Dust voids, which have been reported before, were also observed at high pressures (∼100-150 mTorr) and low powers (∼20-40 W) in the center of the plasma. A mechanism is proposed to explain the observed dynamics of the nanoparticles. The balance between the ion drag force and electrostatic forces and their dependence on particle size are hypothesized to be the dominant factors that determine the nanoparticle cloud dynamics.

KW - dusty plasma

KW - laser light scattering

KW - nanoparticle cloud dynamics

KW - spatiotemporal distribution of nanoparticles

UR - http://www.scopus.com/inward/record.url?scp=84957563482&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84957563482&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/49/8/085203

DO - 10.1088/0022-3727/49/8/085203

M3 - Article

VL - 49

SP - 1DUMMY

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 8

M1 - 085203

ER -