In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition

Radhika C. Mani, Eray S. Aydil

Research output: Contribution to conferencePaper

Original languageEnglish (US)
Number of pages1
StatePublished - Dec 1 2005
Event05AIChE: 2005 AIChE Annual Meeting and Fall Showcase - Cincinnati, OH, United States
Duration: Oct 30 2005Nov 4 2005

Other

Other05AIChE: 2005 AIChE Annual Meeting and Fall Showcase
CountryUnited States
CityCincinnati, OH
Period10/30/0511/4/05

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mani, R. C., & Aydil, E. S. (2005). In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition. Paper presented at 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Cincinnati, OH, United States.