In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition

Radhika C. Mani, Eray Aydil

Research output: Contribution to conferencePaper

Original languageEnglish (US)
Number of pages1
StatePublished - Dec 1 2005
Event05AIChE: 2005 AIChE Annual Meeting and Fall Showcase - Cincinnati, OH, United States
Duration: Oct 30 2005Nov 4 2005

Other

Other05AIChE: 2005 AIChE Annual Meeting and Fall Showcase
CountryUnited States
CityCincinnati, OH
Period10/30/0511/4/05

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Nanocrystalline silicon
Plasma deposition
Thin films

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mani, R. C., & Aydil, E. (2005). In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition. Paper presented at 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Cincinnati, OH, United States.

In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition. / Mani, Radhika C.; Aydil, Eray.

2005. Paper presented at 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Cincinnati, OH, United States.

Research output: Contribution to conferencePaper

Mani, RC & Aydil, E 2005, 'In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition' Paper presented at 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Cincinnati, OH, United States, 10/30/05 - 11/4/05, .
Mani RC, Aydil E. In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition. 2005. Paper presented at 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Cincinnati, OH, United States.
Mani, Radhika C. ; Aydil, Eray. / In Situ real-time diagnostics for studying the structural evolution of nanocrystalline silicon thin films during plasma deposition. Paper presented at 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Cincinnati, OH, United States.1 p.
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