High-speed, sub-15 nm feature size thermochemical nanolithography

Robert Szoszkiewicz, Takashi Okada, Simon C. Jones, Tai De Li, William P. King, Seth R. Marder, Elisa Riedo

Research output: Contribution to journalArticle

Abstract

We report a nanolithography technique that allows simultaneous direct control of the local chemistry and topography of thin polymer films. Specifically, a heated atomic force microscope (AFM) tip can write sub-15 nm hydrophilic features onto a hydrophobic polymer at the rate of 1.4 mm per s. The thermally activated chemical reactions and topography changes depend on the chemical composition of the polymer, the raster speed, the temperature at the AFM tip/sample interface, and the normal load. This method is conceptually simple, direct, extremely rapid, achievable in a range of environments, and potentially adaptable to other materials systems.

Original languageEnglish (US)
Pages (from-to)1064-1069
Number of pages6
JournalNano Letters
Volume7
Issue number4
DOIs
StatePublished - Apr 1 2007

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Nanolithography
Topography
Polymers
Microscopes
high speed
topography
polymers
microscopes
Polymer films
Chemical reactions
Thin films
chemical reactions
chemical composition
Chemical analysis
chemistry
Temperature
temperature

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Chemistry (miscellaneous)

Cite this

Szoszkiewicz, R., Okada, T., Jones, S. C., Li, T. D., King, W. P., Marder, S. R., & Riedo, E. (2007). High-speed, sub-15 nm feature size thermochemical nanolithography. Nano Letters, 7(4), 1064-1069. https://doi.org/10.1021/nl070300f

High-speed, sub-15 nm feature size thermochemical nanolithography. / Szoszkiewicz, Robert; Okada, Takashi; Jones, Simon C.; Li, Tai De; King, William P.; Marder, Seth R.; Riedo, Elisa.

In: Nano Letters, Vol. 7, No. 4, 01.04.2007, p. 1064-1069.

Research output: Contribution to journalArticle

Szoszkiewicz, R, Okada, T, Jones, SC, Li, TD, King, WP, Marder, SR & Riedo, E 2007, 'High-speed, sub-15 nm feature size thermochemical nanolithography', Nano Letters, vol. 7, no. 4, pp. 1064-1069. https://doi.org/10.1021/nl070300f
Szoszkiewicz R, Okada T, Jones SC, Li TD, King WP, Marder SR et al. High-speed, sub-15 nm feature size thermochemical nanolithography. Nano Letters. 2007 Apr 1;7(4):1064-1069. https://doi.org/10.1021/nl070300f
Szoszkiewicz, Robert ; Okada, Takashi ; Jones, Simon C. ; Li, Tai De ; King, William P. ; Marder, Seth R. ; Riedo, Elisa. / High-speed, sub-15 nm feature size thermochemical nanolithography. In: Nano Letters. 2007 ; Vol. 7, No. 4. pp. 1064-1069.
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