High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer

Zakriya Mohammed, Ibrahim M.Elfadel Abe, Mahmoud Rasras

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.

    Original languageEnglish (US)
    Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages1-4
    Number of pages4
    ISBN (Electronic)9781538661994
    DOIs
    StatePublished - Jun 22 2018
    Event20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 - Roma, Italy
    Duration: May 22 2018May 25 2018

    Other

    Other20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018
    CountryItaly
    CityRoma
    Period5/22/185/25/18

    Fingerprint

    accelerometers
    Accelerometers
    microelectromechanical systems
    MEMS
    dynamic range
    stators
    Stators
    sensitivity
    stiction
    Stiction
    Electric potential
    electric potential
    durability
    Durability
    Capacitance
    platforms
    capacitance
    spacing
    air
    Air

    Keywords

    • Accelerometer
    • Impact durability
    • Pull-in voltage
    • Serpentine springs
    • Stiction
    • Torsional springs

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Safety, Risk, Reliability and Quality
    • Electronic, Optical and Magnetic Materials
    • Instrumentation

    Cite this

    Mohammed, Z., Abe, I. M. E., & Rasras, M. (2018). High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018 (pp. 1-4). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2018.8394219

    High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. / Mohammed, Zakriya; Abe, Ibrahim M.Elfadel; Rasras, Mahmoud.

    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-4.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Mohammed, Z, Abe, IME & Rasras, M 2018, High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018, Roma, Italy, 5/22/18. https://doi.org/10.1109/DTIP.2018.8394219
    Mohammed Z, Abe IME, Rasras M. High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-4 https://doi.org/10.1109/DTIP.2018.8394219
    Mohammed, Zakriya ; Abe, Ibrahim M.Elfadel ; Rasras, Mahmoud. / High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-4
    @inproceedings{8e670379dec740679e1384732295d562,
    title = "High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer",
    abstract = "We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.",
    keywords = "Accelerometer, Impact durability, Pull-in voltage, Serpentine springs, Stiction, Torsional springs",
    author = "Zakriya Mohammed and Abe, {Ibrahim M.Elfadel} and Mahmoud Rasras",
    year = "2018",
    month = "6",
    day = "22",
    doi = "10.1109/DTIP.2018.8394219",
    language = "English (US)",
    pages = "1--4",
    booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018",
    publisher = "Institute of Electrical and Electronics Engineers Inc.",

    }

    TY - GEN

    T1 - High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer

    AU - Mohammed, Zakriya

    AU - Abe, Ibrahim M.Elfadel

    AU - Rasras, Mahmoud

    PY - 2018/6/22

    Y1 - 2018/6/22

    N2 - We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.

    AB - We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.

    KW - Accelerometer

    KW - Impact durability

    KW - Pull-in voltage

    KW - Serpentine springs

    KW - Stiction

    KW - Torsional springs

    UR - http://www.scopus.com/inward/record.url?scp=85050191002&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=85050191002&partnerID=8YFLogxK

    U2 - 10.1109/DTIP.2018.8394219

    DO - 10.1109/DTIP.2018.8394219

    M3 - Conference contribution

    SP - 1

    EP - 4

    BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

    PB - Institute of Electrical and Electronics Engineers Inc.

    ER -