High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer

Zakriya Mohammed, Ibrahim M.Elfadel Abe, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.

Original languageEnglish (US)
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538661994
DOIs
StatePublished - Jun 22 2018
Event20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 - Roma, Italy
Duration: May 22 2018May 25 2018

Other

Other20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018
CountryItaly
CityRoma
Period5/22/185/25/18

Fingerprint

accelerometers
Accelerometers
microelectromechanical systems
MEMS
dynamic range
stators
Stators
sensitivity
stiction
Stiction
Electric potential
electric potential
durability
Durability
Capacitance
platforms
capacitance
spacing
air
Air

Keywords

  • Accelerometer
  • Impact durability
  • Pull-in voltage
  • Serpentine springs
  • Stiction
  • Torsional springs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Mohammed, Z., Abe, I. M. E., & Rasras, M. (2018). High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018 (pp. 1-4). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2018.8394219

High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. / Mohammed, Zakriya; Abe, Ibrahim M.Elfadel; Rasras, Mahmoud.

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-4.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mohammed, Z, Abe, IME & Rasras, M 2018, High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018, Roma, Italy, 5/22/18. https://doi.org/10.1109/DTIP.2018.8394219
Mohammed Z, Abe IME, Rasras M. High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-4 https://doi.org/10.1109/DTIP.2018.8394219
Mohammed, Zakriya ; Abe, Ibrahim M.Elfadel ; Rasras, Mahmoud. / High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-4
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N2 - We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.

AB - We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.

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