Fabrication of submicron wire networks using electron beam lithography

Richard J. Bojko, Richard Tiberio, Brian Whitehead, Allen M. Goldman, James Gordon, Fang Yu, Paul M. Chaikin, Carlos Wilks, Mark Itzler

    Research output: Contribution to journalArticle

    Abstract

    We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.

    Original languageEnglish (US)
    Pages (from-to)31-34
    Number of pages4
    JournalMicroelectronic Engineering
    Volume11
    Issue number1-4
    DOIs
    StatePublished - 1990

    Fingerprint

    Superconducting wire
    Electron beam lithography
    Aluminum
    Fractals
    lithography
    wire
    Wire
    electron beams
    Fabrication
    fabrication
    fractals
    aluminum

    ASJC Scopus subject areas

    • Hardware and Architecture
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials
    • Surfaces, Coatings and Films
    • Atomic and Molecular Physics, and Optics

    Cite this

    Bojko, R. J., Tiberio, R., Whitehead, B., Goldman, A. M., Gordon, J., Yu, F., ... Itzler, M. (1990). Fabrication of submicron wire networks using electron beam lithography. Microelectronic Engineering, 11(1-4), 31-34. https://doi.org/10.1016/0167-9317(90)90067-4

    Fabrication of submicron wire networks using electron beam lithography. / Bojko, Richard J.; Tiberio, Richard; Whitehead, Brian; Goldman, Allen M.; Gordon, James; Yu, Fang; Chaikin, Paul M.; Wilks, Carlos; Itzler, Mark.

    In: Microelectronic Engineering, Vol. 11, No. 1-4, 1990, p. 31-34.

    Research output: Contribution to journalArticle

    Bojko, RJ, Tiberio, R, Whitehead, B, Goldman, AM, Gordon, J, Yu, F, Chaikin, PM, Wilks, C & Itzler, M 1990, 'Fabrication of submicron wire networks using electron beam lithography', Microelectronic Engineering, vol. 11, no. 1-4, pp. 31-34. https://doi.org/10.1016/0167-9317(90)90067-4
    Bojko, Richard J. ; Tiberio, Richard ; Whitehead, Brian ; Goldman, Allen M. ; Gordon, James ; Yu, Fang ; Chaikin, Paul M. ; Wilks, Carlos ; Itzler, Mark. / Fabrication of submicron wire networks using electron beam lithography. In: Microelectronic Engineering. 1990 ; Vol. 11, No. 1-4. pp. 31-34.
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