Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates

Davood Shahrjerdi, N. Nuntawong, Tank Akyol, G. Balakrishnan, A. Khoshakhlagh, Sagnik Dey, S. R. Bank, Emanuel Tutuc, Diana Huffaker, Sanjay K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationNorth American Conference on Molecular Beam Epitaxy, 2007
StatePublished - 2007

Cite this

Shahrjerdi, D., Nuntawong, N., Akyol, T., Balakrishnan, G., Khoshakhlagh, A., Dey, S., ... Banerjee, S. K. (2007). Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates. In North American Conference on Molecular Beam Epitaxy, 2007

Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates. / Shahrjerdi, Davood; Nuntawong, N.; Akyol, Tank; Balakrishnan, G.; Khoshakhlagh, A.; Dey, Sagnik; Bank, S. R.; Tutuc, Emanuel; Huffaker, Diana; Banerjee, Sanjay K.

North American Conference on Molecular Beam Epitaxy, 2007. 2007.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shahrjerdi, D, Nuntawong, N, Akyol, T, Balakrishnan, G, Khoshakhlagh, A, Dey, S, Bank, SR, Tutuc, E, Huffaker, D & Banerjee, SK 2007, Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates. in North American Conference on Molecular Beam Epitaxy, 2007.
Shahrjerdi D, Nuntawong N, Akyol T, Balakrishnan G, Khoshakhlagh A, Dey S et al. Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates. In North American Conference on Molecular Beam Epitaxy, 2007. 2007
Shahrjerdi, Davood ; Nuntawong, N. ; Akyol, Tank ; Balakrishnan, G. ; Khoshakhlagh, A. ; Dey, Sagnik ; Bank, S. R. ; Tutuc, Emanuel ; Huffaker, Diana ; Banerjee, Sanjay K. / Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates. North American Conference on Molecular Beam Epitaxy, 2007. 2007.
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title = "Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates",
author = "Davood Shahrjerdi and N. Nuntawong and Tank Akyol and G. Balakrishnan and A. Khoshakhlagh and Sagnik Dey and Bank, {S. R.} and Emanuel Tutuc and Diana Huffaker and Banerjee, {Sanjay K.}",
year = "2007",
language = "English (US)",
booktitle = "North American Conference on Molecular Beam Epitaxy, 2007",

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TY - GEN

T1 - Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates

AU - Shahrjerdi, Davood

AU - Nuntawong, N.

AU - Akyol, Tank

AU - Balakrishnan, G.

AU - Khoshakhlagh, A.

AU - Dey, Sagnik

AU - Bank, S. R.

AU - Tutuc, Emanuel

AU - Huffaker, Diana

AU - Banerjee, Sanjay K.

PY - 2007

Y1 - 2007

M3 - Conference contribution

BT - North American Conference on Molecular Beam Epitaxy, 2007

ER -