Fabrication and characterization of a Fabry-Perot-based chemical sensor

Jaeheon Han, Dean P. Neikirk, Mervyn Clevenger, John McDevitt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A micromachined silicon Fabry-Perot interferometric sensor is demonstrated as an optical chemical sensor. This sensor is based on the combined nature of the amplifying and tuning characteristics of the Fabry-Perot microcavity structure and the doping effect of polymer films such as Poly(3- dodecylthiophene) (P3DDT) upon exposure to an oxidizer, in this case, iodine. The fabricated Fabry-Perot chemical sensors show reversible sensing behavior with a maximum change in transmitted optical intensity of 60%. Significant improvement of the sensing performance is obtained from the Fabry-Perot microcavity structure compared to a simple planar single membrane structure, which indicates the resonant effect of the Fabry-Perot cavity on the chemical sensor. The measured sensing characteristics suggest that the change in absorptance of P3DDT polymer inside the microcavity plays a major role, while the deflection of a microcavity membrane by the P3DDT polymer-induced surface tension gives tunability of the sensor to maximize the amplification of output response by adjusting the Fabry- Perot microcavity gap spacing.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsM.Edward Motamedi, Wayne Bailey
Pages171-178
Number of pages8
Volume2881
StatePublished - 1996
EventMicroelectronic Structures and MEMS for Optical Processing II - Austin, TX, USA
Duration: Oct 14 1996Oct 15 1996

Other

OtherMicroelectronic Structures and MEMS for Optical Processing II
CityAustin, TX, USA
Period10/14/9610/15/96

Fingerprint

Microcavities
Chemical sensors
Fabrication
Sensors
Membrane structures
Optical sensors
Polymers
Iodine
Polymer films
Amplification
Surface tension
Tuning
Doping (additives)
Membranes
Silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Han, J., Neikirk, D. P., Clevenger, M., & McDevitt, J. (1996). Fabrication and characterization of a Fabry-Perot-based chemical sensor. In M. E. Motamedi, & W. Bailey (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2881, pp. 171-178)

Fabrication and characterization of a Fabry-Perot-based chemical sensor. / Han, Jaeheon; Neikirk, Dean P.; Clevenger, Mervyn; McDevitt, John.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / M.Edward Motamedi; Wayne Bailey. Vol. 2881 1996. p. 171-178.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Han, J, Neikirk, DP, Clevenger, M & McDevitt, J 1996, Fabrication and characterization of a Fabry-Perot-based chemical sensor. in ME Motamedi & W Bailey (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 2881, pp. 171-178, Microelectronic Structures and MEMS for Optical Processing II, Austin, TX, USA, 10/14/96.
Han J, Neikirk DP, Clevenger M, McDevitt J. Fabrication and characterization of a Fabry-Perot-based chemical sensor. In Motamedi ME, Bailey W, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2881. 1996. p. 171-178
Han, Jaeheon ; Neikirk, Dean P. ; Clevenger, Mervyn ; McDevitt, John. / Fabrication and characterization of a Fabry-Perot-based chemical sensor. Proceedings of SPIE - The International Society for Optical Engineering. editor / M.Edward Motamedi ; Wayne Bailey. Vol. 2881 1996. pp. 171-178
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