Extraction of parameters of High-K gate dielectrics from admittance data

Samares Kar, Surendra Rawat, Shaloo Rakheja, Dharmendar Reddy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004
StatePublished - 2004

Cite this

Kar, S., Rawat, S., Rakheja, S., & Reddy, D. (2004). Extraction of parameters of High-K gate dielectrics from admittance data. In Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004