Extraction of parameters of High-K gate dielectrics from admittance data

Samares Kar, Surendra Rawat, Shaloo Rakheja, Dharmendar Reddy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004
StatePublished - 2004

Cite this

Kar, S., Rawat, S., Rakheja, S., & Reddy, D. (2004). Extraction of parameters of High-K gate dielectrics from admittance data. In Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004

Extraction of parameters of High-K gate dielectrics from admittance data. / Kar, Samares; Rawat, Surendra; Rakheja, Shaloo; Reddy, Dharmendar.

Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004. 2004.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kar, S, Rawat, S, Rakheja, S & Reddy, D 2004, Extraction of parameters of High-K gate dielectrics from admittance data. in Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004.
Kar S, Rawat S, Rakheja S, Reddy D. Extraction of parameters of High-K gate dielectrics from admittance data. In Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004. 2004
Kar, Samares ; Rawat, Surendra ; Rakheja, Shaloo ; Reddy, Dharmendar. / Extraction of parameters of High-K gate dielectrics from admittance data. Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004. 2004.
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title = "Extraction of parameters of High-K gate dielectrics from admittance data",
author = "Samares Kar and Surendra Rawat and Shaloo Rakheja and Dharmendar Reddy",
year = "2004",
language = "English (US)",
booktitle = "Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004",

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T1 - Extraction of parameters of High-K gate dielectrics from admittance data

AU - Kar, Samares

AU - Rawat, Surendra

AU - Rakheja, Shaloo

AU - Reddy, Dharmendar

PY - 2004

Y1 - 2004

M3 - Conference contribution

BT - Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004

ER -