Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas

Tae Won Kim, Eray Aydil

Research output: Contribution to journalArticle

Abstract

A two-dimensional array of planar Langmuir probes manufactured on a 200-mm-diameter silicon wafer was used to measure the spatial distribution of ion flux impinging on the wafer surface in various discharges of electropositive (Ar) and electronegative (SF6 and Cl2) gases maintained in an inductively coupled plasma etching reactor with a planar spiral coil. In conjunction with the experiments, a two-dimensional fluid model of the plasma was developed to capture the dependence of the ion flux uniformity on plasma operating parameters and reactor geometry through a set of dimensionless numbers which are the ratios of various time and length scales intrinsic to the discharge. These dimensionless ratios include reactor dimensions, the skin depth, the electron energy relaxation length, ion diffusion length, and ionization and attachment rates. The model provides a simple framework within which the spatial variation of ion flux in inductively coupled plasmas can be understood. The approach captures the dependence of ion flux uniformity on plasma operating variables such as pressure and feed gas composition.

Original languageEnglish (US)
Pages (from-to)614-627
Number of pages14
JournalIEEE Transactions on Plasma Science
Volume31
Issue number4 II
DOIs
StatePublished - Aug 1 2003

Fingerprint

wafers
reactors
ions
dimensionless numbers
gas composition
plasma etching
electrostatic probes
diffusion length
attachment
spatial distribution
coils
electron energy
ionization
fluids
silicon
geometry
gases

Keywords

  • Chlorine plasma
  • Discharge modeling
  • Electronegative discharge
  • Inductively coupled plasma
  • Ion flux probe
  • Langmuir probe
  • Plasma etching
  • Plasma uniformity
  • Sulfur hexafluoride plasma

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

Cite this

Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas. / Kim, Tae Won; Aydil, Eray.

In: IEEE Transactions on Plasma Science, Vol. 31, No. 4 II, 01.08.2003, p. 614-627.

Research output: Contribution to journalArticle

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