Electron impact ionization of SiCl2 and SiCl

J. Mahoney, V. Tarnovsky, K. H. Becker

Research output: Contribution to journalArticle

Abstract

We measured absolute partial cross sections for the formation of all singly charged positive ions produced by electron impact on SiCl2 and SiCl from threshold to 200 eV using the fast-neutral-beam technique. Some of the cross section curves exhibit an unusual energy dependence with a pronounced low-energy maximum at an energy around 30 eV, which may be indicative of the presence of indirect ionization channels. Dissociative ionization channels are dominant for both species. The experimentally determined total single ionization cross sections for both species agree very well with calculated cross sections using the Deutsch-Märk (DM) formalism. A brief summary of the ionization cross sections determined for all four SiClx (x=1-4) species is given highlighting similarities and differences.

Original languageEnglish (US)
Pages (from-to)289-293
Number of pages5
JournalEuropean Physical Journal D
Volume46
Issue number2
DOIs
StatePublished - Feb 2008

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electron impact
ionization cross sections
ionization
cross sections
neutral beams
positive ions
energy
formalism
thresholds
curves

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Atomic and Molecular Physics, and Optics

Cite this

Electron impact ionization of SiCl2 and SiCl. / Mahoney, J.; Tarnovsky, V.; Becker, K. H.

In: European Physical Journal D, Vol. 46, No. 2, 02.2008, p. 289-293.

Research output: Contribution to journalArticle

Mahoney, J. ; Tarnovsky, V. ; Becker, K. H. / Electron impact ionization of SiCl2 and SiCl. In: European Physical Journal D. 2008 ; Vol. 46, No. 2. pp. 289-293.
@article{472e468750f7456580d78a7838edb733,
title = "Electron impact ionization of SiCl2 and SiCl",
abstract = "We measured absolute partial cross sections for the formation of all singly charged positive ions produced by electron impact on SiCl2 and SiCl from threshold to 200 eV using the fast-neutral-beam technique. Some of the cross section curves exhibit an unusual energy dependence with a pronounced low-energy maximum at an energy around 30 eV, which may be indicative of the presence of indirect ionization channels. Dissociative ionization channels are dominant for both species. The experimentally determined total single ionization cross sections for both species agree very well with calculated cross sections using the Deutsch-M{\"a}rk (DM) formalism. A brief summary of the ionization cross sections determined for all four SiClx (x=1-4) species is given highlighting similarities and differences.",
author = "J. Mahoney and V. Tarnovsky and Becker, {K. H.}",
year = "2008",
month = "2",
doi = "10.1140/epjd/e2007-00324-1",
language = "English (US)",
volume = "46",
pages = "289--293",
journal = "Zeitschrift fur Physik D-Atoms Molecules and Clusters",
issn = "1434-6060",
publisher = "Springer New York",
number = "2",

}

TY - JOUR

T1 - Electron impact ionization of SiCl2 and SiCl

AU - Mahoney, J.

AU - Tarnovsky, V.

AU - Becker, K. H.

PY - 2008/2

Y1 - 2008/2

N2 - We measured absolute partial cross sections for the formation of all singly charged positive ions produced by electron impact on SiCl2 and SiCl from threshold to 200 eV using the fast-neutral-beam technique. Some of the cross section curves exhibit an unusual energy dependence with a pronounced low-energy maximum at an energy around 30 eV, which may be indicative of the presence of indirect ionization channels. Dissociative ionization channels are dominant for both species. The experimentally determined total single ionization cross sections for both species agree very well with calculated cross sections using the Deutsch-Märk (DM) formalism. A brief summary of the ionization cross sections determined for all four SiClx (x=1-4) species is given highlighting similarities and differences.

AB - We measured absolute partial cross sections for the formation of all singly charged positive ions produced by electron impact on SiCl2 and SiCl from threshold to 200 eV using the fast-neutral-beam technique. Some of the cross section curves exhibit an unusual energy dependence with a pronounced low-energy maximum at an energy around 30 eV, which may be indicative of the presence of indirect ionization channels. Dissociative ionization channels are dominant for both species. The experimentally determined total single ionization cross sections for both species agree very well with calculated cross sections using the Deutsch-Märk (DM) formalism. A brief summary of the ionization cross sections determined for all four SiClx (x=1-4) species is given highlighting similarities and differences.

UR - http://www.scopus.com/inward/record.url?scp=38349107133&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=38349107133&partnerID=8YFLogxK

U2 - 10.1140/epjd/e2007-00324-1

DO - 10.1140/epjd/e2007-00324-1

M3 - Article

VL - 46

SP - 289

EP - 293

JO - Zeitschrift fur Physik D-Atoms Molecules and Clusters

JF - Zeitschrift fur Physik D-Atoms Molecules and Clusters

SN - 1434-6060

IS - 2

ER -