Electron-impact ionization of molecules of interest to processing plasmas

V. Tarnovsky, Kurt Becker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationAtomic Processes in Plasmas
Subtitle of host publicationInvited Papers of the X APS Conference on Atomic Processes in Plasmas
EditorsW. Goldstein
Place of PublicationNew York
PublisherAmerican Institute of Physics Press
Pages85-95
StatePublished - 1996

Cite this

Tarnovsky, V., & Becker, K. (1996). Electron-impact ionization of molecules of interest to processing plasmas. In W. Goldstein (Ed.), Atomic Processes in Plasmas: Invited Papers of the X APS Conference on Atomic Processes in Plasmas (pp. 85-95). New York: American Institute of Physics Press.

Electron-impact ionization of molecules of interest to processing plasmas. / Tarnovsky, V.; Becker, Kurt.

Atomic Processes in Plasmas: Invited Papers of the X APS Conference on Atomic Processes in Plasmas. ed. / W. Goldstein. New York : American Institute of Physics Press, 1996. p. 85-95.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tarnovsky, V & Becker, K 1996, Electron-impact ionization of molecules of interest to processing plasmas. in W Goldstein (ed.), Atomic Processes in Plasmas: Invited Papers of the X APS Conference on Atomic Processes in Plasmas. American Institute of Physics Press, New York, pp. 85-95.
Tarnovsky V, Becker K. Electron-impact ionization of molecules of interest to processing plasmas. In Goldstein W, editor, Atomic Processes in Plasmas: Invited Papers of the X APS Conference on Atomic Processes in Plasmas. New York: American Institute of Physics Press. 1996. p. 85-95
Tarnovsky, V. ; Becker, Kurt. / Electron-impact ionization of molecules of interest to processing plasmas. Atomic Processes in Plasmas: Invited Papers of the X APS Conference on Atomic Processes in Plasmas. editor / W. Goldstein. New York : American Institute of Physics Press, 1996. pp. 85-95
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