Electron-impact ionization of molecules of interest to processing plasmas

V. Tarnovsky, Kurt Becker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationAtomic Processes in Plasmas
Subtitle of host publicationInvited Papers of the X APS Conference on Atomic Processes in Plasmas
EditorsW. Goldstein
Place of PublicationNew York
PublisherAmerican Institute of Physics Press
Pages85-95
StatePublished - 1996

Cite this

Tarnovsky, V., & Becker, K. (1996). Electron-impact ionization of molecules of interest to processing plasmas. In W. Goldstein (Ed.), Atomic Processes in Plasmas: Invited Papers of the X APS Conference on Atomic Processes in Plasmas (pp. 85-95). American Institute of Physics Press.