Effects of Casimir force on pull-in instability in micromembranes

R. C. Batra, Maurizio Porfiri, D. Spinello

Research output: Contribution to journalArticle

Abstract

We analyze pull-in instability of electrostatically actuated microelectromechanical systems, and study changes in pull-in parameters due to the Casimir effect. When the size of the device is reduced, the magnitude of the Casimir force is comparable with that of the Coulomb force and it significantly alters pull-in parameters. We model the deformable conductor as an elastic membrane and consider different geometries. Beyond a certain critical size the pull-in instability occurs with zero applied voltage, and the device may collapse during the fabrication process.

Original languageEnglish (US)
Article number20010
JournalEPL
Volume77
Issue number2
DOIs
StatePublished - Jan 1 2007

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microelectromechanical systems
conductors
membranes
fabrication
electric potential
geometry

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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Effects of Casimir force on pull-in instability in micromembranes. / Batra, R. C.; Porfiri, Maurizio; Spinello, D.

In: EPL, Vol. 77, No. 2, 20010, 01.01.2007.

Research output: Contribution to journalArticle

Batra, R. C. ; Porfiri, Maurizio ; Spinello, D. / Effects of Casimir force on pull-in instability in micromembranes. In: EPL. 2007 ; Vol. 77, No. 2.
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