Effect of substrate coupling on the performance and variability of monolayer MoS2 transistors

Abdullah Alharbi, Zhujun Huang, Takashi Taniguchi, Kenji Watanabe, Davood Shahrjerdi

Research output: Contribution to journalArticle

Abstract

We study the effect of substrate coupling on the variability and the device characteristics of monolayer MoS2 fieldeffect transistors (FETs). In our experiments, we fabricate and characterize three groups of back-gated FETs on SiO2/Si substrates, where each device set represents a distinct interfacial energy between MoS2 and SiO2. We also study a set of devices constructed on hexagonal boron nitride (h-BN) substrates, representing a fourth group where MoS2 is fully decoupled from SiO2. Our electrical measurement results reveal significant improvements of key FET device metrics (contact resistance, mobility, and subthreshold swing) and marked reduction of device variability with reducing the interfacial energy. We attribute the observed improvements of the device characteristics to the reduction of the interface trap density and the suppression of the charged impurity scattering. This study establishes the critical role of substrate coupling on the performance and variability of monolayer MoS2 FETs.

Original languageEnglish (US)
JournalIEEE Electron Device Letters
DOIs
StateAccepted/In press - Jan 1 2018

Fingerprint

Monolayers
Transistors
Substrates
Interfacial energy
Boron nitride
Contact resistance
Scattering
Impurities
Experiments

Keywords

  • Adhesives
  • Annealing
  • Couplings
  • FET
  • Field effect transistors
  • Gold
  • interfacial energy
  • MoS2
  • Performance evaluation
  • Substrates
  • variability

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Effect of substrate coupling on the performance and variability of monolayer MoS2 transistors. / Alharbi, Abdullah; Huang, Zhujun; Taniguchi, Takashi; Watanabe, Kenji; Shahrjerdi, Davood.

In: IEEE Electron Device Letters, 01.01.2018.

Research output: Contribution to journalArticle

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