Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates

Suenne Kim, Yaser Bastani, Haidong Lu, William P. King, Seth Marder, Kenneth H. Sandhage, Alexei Gruverman, Elisa Riedo, Nazanin Bassiri-Gharb

Research output: Contribution to journalArticle

Abstract

A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti 0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in-2 are produced.

Original languageEnglish (US)
Pages (from-to)3786-3790
Number of pages5
JournalAdvanced Materials
Volume23
Issue number33
DOIs
StatePublished - Sep 1 2011

Fingerprint

Silicon
Ferroelectric materials
Nanostructures
Plastics
Nanolithography
Fabrication
Glass
Substrates
Crystallization
Lime
Sol-gels
Metals
soda lime
Oxide semiconductors

Keywords

  • ferroelectric materials
  • nanomanufacturing
  • piezoelectric materials
  • thermochemical nanolithography

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Kim, S., Bastani, Y., Lu, H., King, W. P., Marder, S., Sandhage, K. H., ... Bassiri-Gharb, N. (2011). Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates. Advanced Materials, 23(33), 3786-3790. https://doi.org/10.1002/adma.201101991

Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates. / Kim, Suenne; Bastani, Yaser; Lu, Haidong; King, William P.; Marder, Seth; Sandhage, Kenneth H.; Gruverman, Alexei; Riedo, Elisa; Bassiri-Gharb, Nazanin.

In: Advanced Materials, Vol. 23, No. 33, 01.09.2011, p. 3786-3790.

Research output: Contribution to journalArticle

Kim, S, Bastani, Y, Lu, H, King, WP, Marder, S, Sandhage, KH, Gruverman, A, Riedo, E & Bassiri-Gharb, N 2011, 'Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates', Advanced Materials, vol. 23, no. 33, pp. 3786-3790. https://doi.org/10.1002/adma.201101991
Kim, Suenne ; Bastani, Yaser ; Lu, Haidong ; King, William P. ; Marder, Seth ; Sandhage, Kenneth H. ; Gruverman, Alexei ; Riedo, Elisa ; Bassiri-Gharb, Nazanin. / Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates. In: Advanced Materials. 2011 ; Vol. 23, No. 33. pp. 3786-3790.
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