Design of a robust controller and modeling aspects of a micro cantilever beam with fringing and squeezed gas film damping effects

Marialena Vagia, Antonios Tzes

    Research output: Contribution to journalArticle

    Abstract

    In this study, the modeling and control design aspects of a micro cantilever beam (μCB) with fringing and squeezed thin film damping effects are presented. The suspended clamped-free μCB can move via the application of an external electrically induced force. The nonlinear model of the μCB is linearized in multiple operating points with respect to the beam's displacement. A robust H∞-controller relying on the LMI-theory is designed for the set of the resulting multiple linearized submodels. Particular attention is paid in order to examine the stability issue within the intervals of the operating points. Various test cases are presented in this article, in order to investigate the efficacy of the suggested modeling and control techniques.

    Original languageEnglish (US)
    Pages (from-to)67-79
    Number of pages13
    JournalMechatronics
    Volume23
    Issue number1
    DOIs
    StatePublished - Jan 1 2013

    Fingerprint

    Cantilever beams
    Damping
    Controllers
    Gases
    Thin films

    Keywords

    • LMIs
    • MEMS
    • Micro cantilever beam
    • Robust H∞ controller

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Computer Science Applications
    • Electrical and Electronic Engineering

    Cite this

    Design of a robust controller and modeling aspects of a micro cantilever beam with fringing and squeezed gas film damping effects. / Vagia, Marialena; Tzes, Antonios.

    In: Mechatronics, Vol. 23, No. 1, 01.01.2013, p. 67-79.

    Research output: Contribution to journalArticle

    @article{36722067177e4178ad0f645a905c369f,
    title = "Design of a robust controller and modeling aspects of a micro cantilever beam with fringing and squeezed gas film damping effects",
    abstract = "In this study, the modeling and control design aspects of a micro cantilever beam (μCB) with fringing and squeezed thin film damping effects are presented. The suspended clamped-free μCB can move via the application of an external electrically induced force. The nonlinear model of the μCB is linearized in multiple operating points with respect to the beam's displacement. A robust H∞-controller relying on the LMI-theory is designed for the set of the resulting multiple linearized submodels. Particular attention is paid in order to examine the stability issue within the intervals of the operating points. Various test cases are presented in this article, in order to investigate the efficacy of the suggested modeling and control techniques.",
    keywords = "LMIs, MEMS, Micro cantilever beam, Robust H∞ controller",
    author = "Marialena Vagia and Antonios Tzes",
    year = "2013",
    month = "1",
    day = "1",
    doi = "10.1016/j.mechatronics.2012.10.010",
    language = "English (US)",
    volume = "23",
    pages = "67--79",
    journal = "Mechatronics",
    issn = "0957-4158",
    publisher = "Elsevier Limited",
    number = "1",

    }

    TY - JOUR

    T1 - Design of a robust controller and modeling aspects of a micro cantilever beam with fringing and squeezed gas film damping effects

    AU - Vagia, Marialena

    AU - Tzes, Antonios

    PY - 2013/1/1

    Y1 - 2013/1/1

    N2 - In this study, the modeling and control design aspects of a micro cantilever beam (μCB) with fringing and squeezed thin film damping effects are presented. The suspended clamped-free μCB can move via the application of an external electrically induced force. The nonlinear model of the μCB is linearized in multiple operating points with respect to the beam's displacement. A robust H∞-controller relying on the LMI-theory is designed for the set of the resulting multiple linearized submodels. Particular attention is paid in order to examine the stability issue within the intervals of the operating points. Various test cases are presented in this article, in order to investigate the efficacy of the suggested modeling and control techniques.

    AB - In this study, the modeling and control design aspects of a micro cantilever beam (μCB) with fringing and squeezed thin film damping effects are presented. The suspended clamped-free μCB can move via the application of an external electrically induced force. The nonlinear model of the μCB is linearized in multiple operating points with respect to the beam's displacement. A robust H∞-controller relying on the LMI-theory is designed for the set of the resulting multiple linearized submodels. Particular attention is paid in order to examine the stability issue within the intervals of the operating points. Various test cases are presented in this article, in order to investigate the efficacy of the suggested modeling and control techniques.

    KW - LMIs

    KW - MEMS

    KW - Micro cantilever beam

    KW - Robust H∞ controller

    UR - http://www.scopus.com/inward/record.url?scp=84901317015&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84901317015&partnerID=8YFLogxK

    U2 - 10.1016/j.mechatronics.2012.10.010

    DO - 10.1016/j.mechatronics.2012.10.010

    M3 - Article

    VL - 23

    SP - 67

    EP - 79

    JO - Mechatronics

    JF - Mechatronics

    SN - 0957-4158

    IS - 1

    ER -