Design and simulation of MEMS-based broadband unidirectional CPW-fed rectangular slot antenna

Weiqiang Chen, Gui Fu Ding, Bin Hong Li, Xiao Feng Sun

Research output: Contribution to journalArticle

Abstract

A broadband unidirectional coplanar waveguide (CPW) fed rectangular slot millimeter wave antenna based on micro-electro-mechanical systems (MEMS) non-silicon micro-fabrication technology is discussed. A wide impedance bandwidth of 75% (S11 < -10 dB) was obtained. By adding three layers of wave cut-off slots and a guiding slot, the antenna achieves unidirectional radiation, and the max gain of the antenna increases from 3.8 to 6.8 dB. Ansoft HFSS and CST Microwave Studio, two high frequency structure simulation softwares based on finite element method (FEM) and finite integration method (FIM), respectively, are used to simulate and analyze the antenna performances.

Original languageEnglish (US)
Pages (from-to)343-347
Number of pages5
JournalMicrosystem Technologies
Volume14
Issue number3
DOIs
StatePublished - Mar 2008

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slot antennas
Slot antennas
Coplanar waveguides
Antenna feeders
antennas
slots
Antennas
broadband
waveguides
simulation
Microfabrication
Studios
Millimeter waves
millimeter waves
finite element method
cut-off
Microwaves
impedance
bandwidth
computer programs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Design and simulation of MEMS-based broadband unidirectional CPW-fed rectangular slot antenna. / Chen, Weiqiang; Ding, Gui Fu; Li, Bin Hong; Sun, Xiao Feng.

In: Microsystem Technologies, Vol. 14, No. 3, 03.2008, p. 343-347.

Research output: Contribution to journalArticle

Chen, Weiqiang ; Ding, Gui Fu ; Li, Bin Hong ; Sun, Xiao Feng. / Design and simulation of MEMS-based broadband unidirectional CPW-fed rectangular slot antenna. In: Microsystem Technologies. 2008 ; Vol. 14, No. 3. pp. 343-347.
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