Continuous ultraviolet emissions produced by electron impact on SF 6 and NF3

Z. J. Jabbour, K. A. Blanks, K. E. Martus, K. Becker

Research output: Contribution to journalArticle

Abstract

We studied the continuous emissions in the wavelength range 2000 to 3400 Å produced by low energy electron impact on SF6 and NF 3. In both cases two different features contribute to the emission spectrum. In NF3, we found a structured emission with maxima at 2880, 3005, and 3130 Å and an onset energy of 8.5±2 eV superimposed on a continuous feature from 2500 to 3500 Å with an onset at about 30 eV. We attribute the structured emission, which has an emission cross section of 2.2×10-19 cm2 at 25 eV, to the NF2 fragment. In SF6, we observed a broad emission feature from 2000 to 3300 Å with maximum intensity at 3010 and 3145 Å with a comparatively weak shoulder at 3160 Å. The 3160 Å feature, which has an emission cross section of about 2×10-20 cm2 at 25 eV, has a single onset at 13.5±1.5 eV, whereas at least two different processes with onsets at 28±2 eV and 42±3 eV, respectively, contribute to the main SF6 emission. The potential relevance of these continuous emissions for diagnostic purposes of NF3 and SF6 processing plasmas utilizing plasma-induced emission spectroscopy and laser-induced fluorescence techniques is discussed.

Original languageEnglish (US)
Pages (from-to)4252-4256
Number of pages5
JournalThe Journal of chemical physics
Volume88
Issue number7
StatePublished - 1987

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Plasma applications
ultraviolet emission
Emission spectroscopy
electron impact
Fluorescence
Plasmas
Wavelength
Electrons
Lasers
cross sections
shoulders
laser induced fluorescence
emission spectra
fragments
energy

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Continuous ultraviolet emissions produced by electron impact on SF 6 and NF3. / Jabbour, Z. J.; Blanks, K. A.; Martus, K. E.; Becker, K.

In: The Journal of chemical physics, Vol. 88, No. 7, 1987, p. 4252-4256.

Research output: Contribution to journalArticle

Jabbour, Z. J. ; Blanks, K. A. ; Martus, K. E. ; Becker, K. / Continuous ultraviolet emissions produced by electron impact on SF 6 and NF3. In: The Journal of chemical physics. 1987 ; Vol. 88, No. 7. pp. 4252-4256.
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