Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

Elisa Riedo, F. Comin, J. Chevrier, A. M. Bonnot

Research output: Contribution to journalArticle

Abstract

We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm2). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp3-bonded carbon sites in the DLC films and an increase in N-sp3 C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.

Original languageEnglish (US)
Pages (from-to)4365-4370
Number of pages6
JournalJournal of Applied Physics
Volume88
Issue number7
DOIs
StatePublished - Oct 1 2000

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carbon nitrides
pulsed lasers
thin films
laser deposition
fluence
carbon
nitrogen
Raman spectroscopy
diamonds
x ray spectroscopy
pulsed laser deposition
energy dissipation
photoelectron spectroscopy
electron energy
atmospheres
vacuum
electronics
spectroscopy
lasers

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Composition and chemical bonding of pulsed laser deposited carbon nitride thin films. / Riedo, Elisa; Comin, F.; Chevrier, J.; Bonnot, A. M.

In: Journal of Applied Physics, Vol. 88, No. 7, 01.10.2000, p. 4365-4370.

Research output: Contribution to journalArticle

Riedo, Elisa ; Comin, F. ; Chevrier, J. ; Bonnot, A. M. / Composition and chemical bonding of pulsed laser deposited carbon nitride thin films. In: Journal of Applied Physics. 2000 ; Vol. 88, No. 7. pp. 4365-4370.
@article{48627e5ff0334f88bdc5930c09cdff1d,
title = "Composition and chemical bonding of pulsed laser deposited carbon nitride thin films",
abstract = "We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm2). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp3-bonded carbon sites in the DLC films and an increase in N-sp3 C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.",
author = "Elisa Riedo and F. Comin and J. Chevrier and Bonnot, {A. M.}",
year = "2000",
month = "10",
day = "1",
doi = "10.1063/1.1309041",
language = "English (US)",
volume = "88",
pages = "4365--4370",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "7",

}

TY - JOUR

T1 - Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

AU - Riedo, Elisa

AU - Comin, F.

AU - Chevrier, J.

AU - Bonnot, A. M.

PY - 2000/10/1

Y1 - 2000/10/1

N2 - We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm2). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp3-bonded carbon sites in the DLC films and an increase in N-sp3 C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.

AB - We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm2). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp3-bonded carbon sites in the DLC films and an increase in N-sp3 C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.

UR - http://www.scopus.com/inward/record.url?scp=0000445622&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0000445622&partnerID=8YFLogxK

U2 - 10.1063/1.1309041

DO - 10.1063/1.1309041

M3 - Article

VL - 88

SP - 4365

EP - 4370

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 7

ER -