Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Erik A. Edelberg, Andrew Perry, Neil Benjamin, Eray Aydil

Research output: Contribution to journalArticle

Abstract

The energy distribution of ions bombarding radio-frequency biased electrodes in high-density plasma reactors are measured using a compact floating retarding ion energy analyzer. The design of the analyzer, its operation and capabilities are discussed.

Original languageEnglish (US)
Pages (from-to)2689-2698
Number of pages10
JournalReview of Scientific Instruments
Volume70
Issue number6
DOIs
StatePublished - Jan 1 1999

Fingerprint

floating
analyzers
radio frequencies
energy distribution
Electrodes
electrodes
Plasma density
Ions
plasma density
ions
reactors
retarding
energy

ASJC Scopus subject areas

  • Instrumentation

Cite this

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces. / Edelberg, Erik A.; Perry, Andrew; Benjamin, Neil; Aydil, Eray.

In: Review of Scientific Instruments, Vol. 70, No. 6, 01.01.1999, p. 2689-2698.

Research output: Contribution to journalArticle

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