Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Erik A. Edelberg, Andrew Perry, Neil Benjamin, Eray Aydil

Research output: Contribution to journalArticle


The energy distribution of ions bombarding radio-frequency biased electrodes in high-density plasma reactors are measured using a compact floating retarding ion energy analyzer. The design of the analyzer, its operation and capabilities are discussed.

Original languageEnglish (US)
Pages (from-to)2689-2698
Number of pages10
JournalReview of Scientific Instruments
Issue number6
Publication statusPublished - Jan 1 1999


ASJC Scopus subject areas

  • Instrumentation

Cite this