Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor

Hemant Melkote, Farshad Khorrami, Jehuda Ish-Shalom

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we present a robust adaptive control system design for three degree-of-freedom linear motion ultra accurate (Sawyer) stepper motors. Such motors are commonly used in the semiconductor industry for wafer-probing and in automated assembly. A detailed model of the motor is developed. Thereafter, a controller is designed for the motor that is robust to parametric uncertainties in the model and achieves good tracking performance in the presence of disturbances while compensating for the undesirable effects of yaw rotation of the motor in the platen plane. The proposed current level controller utilizes all the states for feedback. The stability of the closed-loop system is shown using Lyapunov techniques. The tracking errors are shown to be globally uniformly bounded. Simulation studies are carried out to show the efficacy of the proposed control design methodology.

Original languageEnglish (US)
Title of host publicationIEEE Conference on Control Applications - Proceedings
Editors Anon
PublisherIEEE
Pages639-644
Number of pages6
StatePublished - 1997
EventProceedings of the 1997 IEEE International Conference on Control Applications - Hartford, CT, USA
Duration: Oct 5 1997Oct 7 1997

Other

OtherProceedings of the 1997 IEEE International Conference on Control Applications
CityHartford, CT, USA
Period10/5/9710/7/97

Fingerprint

Linear motors
Adaptive control systems
Controllers
Closed loop systems
Systems analysis
Semiconductor materials
Feedback
Industry

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Melkote, H., Khorrami, F., & Ish-Shalom, J. (1997). Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor. In Anon (Ed.), IEEE Conference on Control Applications - Proceedings (pp. 639-644). IEEE.

Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor. / Melkote, Hemant; Khorrami, Farshad; Ish-Shalom, Jehuda.

IEEE Conference on Control Applications - Proceedings. ed. / Anon. IEEE, 1997. p. 639-644.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Melkote, H, Khorrami, F & Ish-Shalom, J 1997, Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor. in Anon (ed.), IEEE Conference on Control Applications - Proceedings. IEEE, pp. 639-644, Proceedings of the 1997 IEEE International Conference on Control Applications, Hartford, CT, USA, 10/5/97.
Melkote H, Khorrami F, Ish-Shalom J. Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor. In Anon, editor, IEEE Conference on Control Applications - Proceedings. IEEE. 1997. p. 639-644
Melkote, Hemant ; Khorrami, Farshad ; Ish-Shalom, Jehuda. / Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor. IEEE Conference on Control Applications - Proceedings. editor / Anon. IEEE, 1997. pp. 639-644
@inproceedings{d143294fc2d04006bc692c77dc752557,
title = "Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor",
abstract = "In this paper, we present a robust adaptive control system design for three degree-of-freedom linear motion ultra accurate (Sawyer) stepper motors. Such motors are commonly used in the semiconductor industry for wafer-probing and in automated assembly. A detailed model of the motor is developed. Thereafter, a controller is designed for the motor that is robust to parametric uncertainties in the model and achieves good tracking performance in the presence of disturbances while compensating for the undesirable effects of yaw rotation of the motor in the platen plane. The proposed current level controller utilizes all the states for feedback. The stability of the closed-loop system is shown using Lyapunov techniques. The tracking errors are shown to be globally uniformly bounded. Simulation studies are carried out to show the efficacy of the proposed control design methodology.",
author = "Hemant Melkote and Farshad Khorrami and Jehuda Ish-Shalom",
year = "1997",
language = "English (US)",
pages = "639--644",
editor = "Anon",
booktitle = "IEEE Conference on Control Applications - Proceedings",
publisher = "IEEE",

}

TY - GEN

T1 - Closed-loop control of a three degree-of-freedom ultra accurate linear stepper motor

AU - Melkote, Hemant

AU - Khorrami, Farshad

AU - Ish-Shalom, Jehuda

PY - 1997

Y1 - 1997

N2 - In this paper, we present a robust adaptive control system design for three degree-of-freedom linear motion ultra accurate (Sawyer) stepper motors. Such motors are commonly used in the semiconductor industry for wafer-probing and in automated assembly. A detailed model of the motor is developed. Thereafter, a controller is designed for the motor that is robust to parametric uncertainties in the model and achieves good tracking performance in the presence of disturbances while compensating for the undesirable effects of yaw rotation of the motor in the platen plane. The proposed current level controller utilizes all the states for feedback. The stability of the closed-loop system is shown using Lyapunov techniques. The tracking errors are shown to be globally uniformly bounded. Simulation studies are carried out to show the efficacy of the proposed control design methodology.

AB - In this paper, we present a robust adaptive control system design for three degree-of-freedom linear motion ultra accurate (Sawyer) stepper motors. Such motors are commonly used in the semiconductor industry for wafer-probing and in automated assembly. A detailed model of the motor is developed. Thereafter, a controller is designed for the motor that is robust to parametric uncertainties in the model and achieves good tracking performance in the presence of disturbances while compensating for the undesirable effects of yaw rotation of the motor in the platen plane. The proposed current level controller utilizes all the states for feedback. The stability of the closed-loop system is shown using Lyapunov techniques. The tracking errors are shown to be globally uniformly bounded. Simulation studies are carried out to show the efficacy of the proposed control design methodology.

UR - http://www.scopus.com/inward/record.url?scp=0031336809&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031336809&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0031336809

SP - 639

EP - 644

BT - IEEE Conference on Control Applications - Proceedings

A2 - Anon, null

PB - IEEE

ER -