Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system

Hemant Melkote, Farshad Khorrami

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Modeling and control of a high-speed ultra-accurate XY stage used in manufacturing systems is considered in this paper. The base XY stage is a two dimensional linear stepper (Sawyer) motor including a rotational (yaw) degree-of-freedom. Manufacturing systems based on Sawyer motors are widely used in wafer probing applications and in automated assembly. A Sawyer sensor is being integrated for measuring the motor's position, velocity and yaw rotation for closed-loop control purposes on our testbed at the CRRL. Utilizing our earlier results on robust control of nonlinear systems, an adaptive current-level controller is designed for the motor that renders the closed-loop system robust to a variety of uncertainties and disturbances. A detailed model of the motor that takes into account the significant uncertainties of the motor is used in the control design. The tracking error is shown to asymptotically converge to the origin. Simulation studies are presented to validate the controller performance.

Original languageEnglish (US)
Title of host publicationProceedings - IEEE International Conference on Robotics and Automation
PublisherIEEE
Pages1812-1817
Number of pages6
Volume3
StatePublished - 1999
EventProceedings of the 1999 IEEE International Conference on Robotics and Automation, ICRA99 - Detroit, MI, USA
Duration: May 10 1999May 15 1999

Other

OtherProceedings of the 1999 IEEE International Conference on Robotics and Automation, ICRA99
CityDetroit, MI, USA
Period5/10/995/15/99

Fingerprint

Degrees of freedom (mechanics)
Controllers
Robust control
Testbeds
Closed loop systems
Nonlinear systems
Sensors

ASJC Scopus subject areas

  • Software
  • Control and Systems Engineering

Cite this

Melkote, H., & Khorrami, F. (1999). Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system. In Proceedings - IEEE International Conference on Robotics and Automation (Vol. 3, pp. 1812-1817). IEEE.

Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system. / Melkote, Hemant; Khorrami, Farshad.

Proceedings - IEEE International Conference on Robotics and Automation. Vol. 3 IEEE, 1999. p. 1812-1817.

Research output: Chapter in Book/Report/Conference proceedingChapter

Melkote, H & Khorrami, F 1999, Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system. in Proceedings - IEEE International Conference on Robotics and Automation. vol. 3, IEEE, pp. 1812-1817, Proceedings of the 1999 IEEE International Conference on Robotics and Automation, ICRA99, Detroit, MI, USA, 5/10/99.
Melkote H, Khorrami F. Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system. In Proceedings - IEEE International Conference on Robotics and Automation. Vol. 3. IEEE. 1999. p. 1812-1817
Melkote, Hemant ; Khorrami, Farshad. / Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system. Proceedings - IEEE International Conference on Robotics and Automation. Vol. 3 IEEE, 1999. pp. 1812-1817
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