Block copolymer nanolithography

M. Trawick, D. Angelescu, P. Chaikin, R. Register

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Original languageEnglish (US)
    Title of host publicationNanolithography and Patterning Techniques in Microelectronics
    PublisherElsevier Ltd
    Pages1-38
    Number of pages38
    ISBN (Print)9781855739314
    DOIs
    StatePublished - Sep 2005

    Fingerprint

    Nanolithography
    Block copolymers

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Trawick, M., Angelescu, D., Chaikin, P., & Register, R. (2005). Block copolymer nanolithography. In Nanolithography and Patterning Techniques in Microelectronics (pp. 1-38). Elsevier Ltd. https://doi.org/10.1533/9781845690908.1

    Block copolymer nanolithography. / Trawick, M.; Angelescu, D.; Chaikin, P.; Register, R.

    Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd, 2005. p. 1-38.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Trawick, M, Angelescu, D, Chaikin, P & Register, R 2005, Block copolymer nanolithography. in Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd, pp. 1-38. https://doi.org/10.1533/9781845690908.1
    Trawick M, Angelescu D, Chaikin P, Register R. Block copolymer nanolithography. In Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd. 2005. p. 1-38 https://doi.org/10.1533/9781845690908.1
    Trawick, M. ; Angelescu, D. ; Chaikin, P. ; Register, R. / Block copolymer nanolithography. Nanolithography and Patterning Techniques in Microelectronics. Elsevier Ltd, 2005. pp. 1-38
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