Block copolymer nanolithography

M. Trawick, D. Angelescu, P. Chaikin, R. Register

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Original languageEnglish (US)
    Title of host publicationNanolithography and Patterning Techniques in Microelectronics
    PublisherElsevier Ltd
    Pages1-38
    Number of pages38
    ISBN (Print)9781855739314
    DOIs
    StatePublished - Sep 2005

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Trawick, M., Angelescu, D., Chaikin, P., & Register, R. (2005). Block copolymer nanolithography. In Nanolithography and Patterning Techniques in Microelectronics (pp. 1-38). Elsevier Ltd. https://doi.org/10.1533/9781845690908.1