Atomic layer deposition of AI203 on GaAs substrates

Davood Shahrjerdi, Shawn S. Coffee, John G. Ekerdt, Sanjay K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication38th IEEE Semiconductor Interface Specialist Conference, 2007
StatePublished - 2007

Cite this

Shahrjerdi, D., Coffee, S. S., Ekerdt, J. G., & Banerjee, S. K. (2007). Atomic layer deposition of AI203 on GaAs substrates. In 38th IEEE Semiconductor Interface Specialist Conference, 2007

Atomic layer deposition of AI203 on GaAs substrates. / Shahrjerdi, Davood; Coffee, Shawn S.; Ekerdt, John G.; Banerjee, Sanjay K.

38th IEEE Semiconductor Interface Specialist Conference, 2007. 2007.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shahrjerdi, D, Coffee, SS, Ekerdt, JG & Banerjee, SK 2007, Atomic layer deposition of AI203 on GaAs substrates. in 38th IEEE Semiconductor Interface Specialist Conference, 2007.
Shahrjerdi D, Coffee SS, Ekerdt JG, Banerjee SK. Atomic layer deposition of AI203 on GaAs substrates. In 38th IEEE Semiconductor Interface Specialist Conference, 2007. 2007
Shahrjerdi, Davood ; Coffee, Shawn S. ; Ekerdt, John G. ; Banerjee, Sanjay K. / Atomic layer deposition of AI203 on GaAs substrates. 38th IEEE Semiconductor Interface Specialist Conference, 2007. 2007.
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title = "Atomic layer deposition of AI203 on GaAs substrates",
author = "Davood Shahrjerdi and Coffee, {Shawn S.} and Ekerdt, {John G.} and Banerjee, {Sanjay K.}",
year = "2007",
language = "English (US)",
booktitle = "38th IEEE Semiconductor Interface Specialist Conference, 2007",

}

TY - GEN

T1 - Atomic layer deposition of AI203 on GaAs substrates

AU - Shahrjerdi, Davood

AU - Coffee, Shawn S.

AU - Ekerdt, John G.

AU - Banerjee, Sanjay K.

PY - 2007

Y1 - 2007

M3 - Conference contribution

BT - 38th IEEE Semiconductor Interface Specialist Conference, 2007

ER -